Zesheng Liu, Yan Liu, Xiang Chen, Ying Xie, Yuanhang Qu, Xiyu Gu, Xin Tong, Haiyang Li, Wenjuan Liu, Yao Cai, Shishang Guo, Chengliang Sun
{"title":"基于 AlN/ScAlN 复合薄膜的无杂散 A1 模式羔羊波谐振器，具有可调节的有效机电耦合系数","authors":"Zesheng Liu, Yan Liu, Xiang Chen, Ying Xie, Yuanhang Qu, Xiyu Gu, Xin Tong, Haiyang Li, Wenjuan Liu, Yao Cai, Shishang Guo, Chengliang Sun","doi":"10.1088/1361-6463/ad7150","DOIUrl":null,"url":null,"abstract":"Narrow-band filters are widely applied in the narrow-band Internet of Things (NB-IoT). To meet the diverse bandwidth requirements of NB-IoT applications, this work presents the first antisymmetric (A1) mode Lamb wave resonators (LWRs) based on aluminum nitride (AlN) and AlN/ScAlN composite films. The impact of structural parameters, including pitch (<italic toggle=\"yes\">P</italic>) and duty factor (DF), on main mode excitation and suppression of spurious modes is investigated. The optimal <italic toggle=\"yes\">P</italic> and DF are found to be 10 <italic toggle=\"yes\">μ</italic>m and 0.05, respectively. Based on spurious-free A1 LWRs, an AlN/Sc<sub>0.096</sub>Al<sub>0.904</sub>N composite film is utilized to adjust the effective electromechanical coupling coefficient <inline-formula>\n<tex-math><?CDATA $k_{{\\text{eff}}}^{\\text{2}}$?></tex-math><mml:math overflow=\"scroll\"><mml:mrow><mml:msubsup><mml:mi>k</mml:mi><mml:mrow><mml:mrow><mml:mtext>eff</mml:mtext></mml:mrow></mml:mrow><mml:mrow><mml:mtext>2</mml:mtext></mml:mrow></mml:msubsup></mml:mrow></mml:math><inline-graphic xlink:href=\"dad7150ieqn1.gif\"></inline-graphic></inline-formula>. The experiment results demonstrate a tunable <inline-formula>\n<tex-math><?CDATA $k_{{\\text{eff}}}^{\\text{2}}$?></tex-math><mml:math overflow=\"scroll\"><mml:mrow><mml:msubsup><mml:mi>k</mml:mi><mml:mrow><mml:mrow><mml:mtext>eff</mml:mtext></mml:mrow></mml:mrow><mml:mrow><mml:mtext>2</mml:mtext></mml:mrow></mml:msubsup></mml:mrow></mml:math><inline-graphic xlink:href=\"dad7150ieqn2.gif\"></inline-graphic></inline-formula> from 0.40% (5 MHz) to 0.25% (3 MHz), realizing a 37.5% adjustment range of <inline-formula>\n<tex-math><?CDATA $k_{{\\text{eff}}}^{\\text{2}}$?></tex-math><mml:math overflow=\"scroll\"><mml:mrow><mml:msubsup><mml:mi>k</mml:mi><mml:mrow><mml:mrow><mml:mtext>eff</mml:mtext></mml:mrow></mml:mrow><mml:mrow><mml:mtext>2</mml:mtext></mml:mrow></mml:msubsup></mml:mrow></mml:math><inline-graphic xlink:href=\"dad7150ieqn3.gif\"></inline-graphic></inline-formula>, which establishes a foundation for narrow-band tunable filters.","PeriodicalId":16789,"journal":{"name":"Journal of Physics D: Applied Physics","volume":"45 1","pages":""},"PeriodicalIF":3.1000,"publicationDate":"2024-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient\",\"authors\":\"Zesheng Liu, Yan Liu, Xiang Chen, Ying Xie, Yuanhang Qu, Xiyu Gu, Xin Tong, Haiyang Li, Wenjuan Liu, Yao Cai, Shishang Guo, Chengliang Sun\",\"doi\":\"10.1088/1361-6463/ad7150\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Narrow-band filters are widely applied in the narrow-band Internet of Things (NB-IoT). To meet the diverse bandwidth requirements of NB-IoT applications, this work presents the first antisymmetric (A1) mode Lamb wave resonators (LWRs) based on aluminum nitride (AlN) and AlN/ScAlN composite films. The impact of structural parameters, including pitch (<italic toggle=\\\"yes\\\">P</italic>) and duty factor (DF), on main mode excitation and suppression of spurious modes is investigated. The optimal <italic toggle=\\\"yes\\\">P</italic> and DF are found to be 10 <italic toggle=\\\"yes\\\">μ</italic>m and 0.05, respectively. Based on spurious-free A1 LWRs, an AlN/Sc<sub>0.096</sub>Al<sub>0.904</sub>N composite film is utilized to adjust the effective electromechanical coupling coefficient <inline-formula>\\n<tex-math><?CDATA $k_{{\\\\text{eff}}}^{\\\\text{2}}$?></tex-math><mml:math overflow=\\\"scroll\\\"><mml:mrow><mml:msubsup><mml:mi>k</mml:mi><mml:mrow><mml:mrow><mml:mtext>eff</mml:mtext></mml:mrow></mml:mrow><mml:mrow><mml:mtext>2</mml:mtext></mml:mrow></mml:msubsup></mml:mrow></mml:math><inline-graphic xlink:href=\\\"dad7150ieqn1.gif\\\"></inline-graphic></inline-formula>. The experiment results demonstrate a tunable <inline-formula>\\n<tex-math><?CDATA $k_{{\\\\text{eff}}}^{\\\\text{2}}$?></tex-math><mml:math overflow=\\\"scroll\\\"><mml:mrow><mml:msubsup><mml:mi>k</mml:mi><mml:mrow><mml:mrow><mml:mtext>eff</mml:mtext></mml:mrow></mml:mrow><mml:mrow><mml:mtext>2</mml:mtext></mml:mrow></mml:msubsup></mml:mrow></mml:math><inline-graphic xlink:href=\\\"dad7150ieqn2.gif\\\"></inline-graphic></inline-formula> from 0.40% (5 MHz) to 0.25% (3 MHz), realizing a 37.5% adjustment range of <inline-formula>\\n<tex-math><?CDATA $k_{{\\\\text{eff}}}^{\\\\text{2}}$?></tex-math><mml:math overflow=\\\"scroll\\\"><mml:mrow><mml:msubsup><mml:mi>k</mml:mi><mml:mrow><mml:mrow><mml:mtext>eff</mml:mtext></mml:mrow></mml:mrow><mml:mrow><mml:mtext>2</mml:mtext></mml:mrow></mml:msubsup></mml:mrow></mml:math><inline-graphic xlink:href=\\\"dad7150ieqn3.gif\\\"></inline-graphic></inline-formula>, which establishes a foundation for narrow-band tunable filters.\",\"PeriodicalId\":16789,\"journal\":{\"name\":\"Journal of Physics D: Applied Physics\",\"volume\":\"45 1\",\"pages\":\"\"},\"PeriodicalIF\":3.1000,\"publicationDate\":\"2024-09-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Physics D: Applied Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6463/ad7150\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Physics D: Applied Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1088/1361-6463/ad7150","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
Narrow-band filters are widely applied in the narrow-band Internet of Things (NB-IoT). To meet the diverse bandwidth requirements of NB-IoT applications, this work presents the first antisymmetric (A1) mode Lamb wave resonators (LWRs) based on aluminum nitride (AlN) and AlN/ScAlN composite films. The impact of structural parameters, including pitch (P) and duty factor (DF), on main mode excitation and suppression of spurious modes is investigated. The optimal P and DF are found to be 10 μm and 0.05, respectively. Based on spurious-free A1 LWRs, an AlN/Sc0.096Al0.904N composite film is utilized to adjust the effective electromechanical coupling coefficient keff2. The experiment results demonstrate a tunable keff2 from 0.40% (5 MHz) to 0.25% (3 MHz), realizing a 37.5% adjustment range of keff2, which establishes a foundation for narrow-band tunable filters.
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This journal is concerned with all aspects of applied physics research, from biophysics, magnetism, plasmas and semiconductors to the structure and properties of matter.
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