使用纯钙靶的直流磁控管放电

IF 0.4 4区物理与天体物理 Q4 PHYSICS, MULTIDISCIPLINARY

Russian Physics Journal Pub Date : 2024-08-23 DOI:10.1007/s11182-024-03241-x

M. V. Shandrikov, E. M. Oks, A. A. Cherkasov

{"title":"使用纯钙靶的直流磁控管放电","authors":"M. V. Shandrikov, E. M. Oks, A. A. Cherkasov","doi":"10.1007/s11182-024-03241-x","DOIUrl":null,"url":null,"abstract":"<p>The paper focuses on magnetron sputtering of the pure calcium target in DC magnetron discharge. The target diameter and thickness are 50 and 3 mm, respectively. Argon and krypton are used as working gases. Continuous and medium frequency discharges are investigated along with the discharge and plasma parameters, including a current–voltage characteristic, mass-to-charge ratio of the plasma composition, ion current, and deposition rate.</p>","PeriodicalId":770,"journal":{"name":"Russian Physics Journal","volume":null,"pages":null},"PeriodicalIF":0.4000,"publicationDate":"2024-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"DC Magnetron Discharge with Pure Calcium Target\",\"authors\":\"M. V. Shandrikov, E. M. Oks, A. A. Cherkasov\",\"doi\":\"10.1007/s11182-024-03241-x\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>The paper focuses on magnetron sputtering of the pure calcium target in DC magnetron discharge. The target diameter and thickness are 50 and 3 mm, respectively. Argon and krypton are used as working gases. Continuous and medium frequency discharges are investigated along with the discharge and plasma parameters, including a current–voltage characteristic, mass-to-charge ratio of the plasma composition, ion current, and deposition rate.</p>\",\"PeriodicalId\":770,\"journal\":{\"name\":\"Russian Physics Journal\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.4000,\"publicationDate\":\"2024-08-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Russian Physics Journal\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://link.springer.com/article/10.1007/s11182-024-03241-x\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Russian Physics Journal","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1007/s11182-024-03241-x","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

本文的重点是在直流磁控放电中对纯钙靶进行磁控溅射。靶的直径和厚度分别为 50 毫米和 3 毫米。工作气体为氩气和氪气。研究了连续和中频放电以及放电和等离子体参数，包括电流-电压特性、等离子体成分的质量-电荷比、离子电流和沉积率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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DC Magnetron Discharge with Pure Calcium Target

The paper focuses on magnetron sputtering of the pure calcium target in DC magnetron discharge. The target diameter and thickness are 50 and 3 mm, respectively. Argon and krypton are used as working gases. Continuous and medium frequency discharges are investigated along with the discharge and plasma parameters, including a current–voltage characteristic, mass-to-charge ratio of the plasma composition, ion current, and deposition rate.

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来源期刊

Russian Physics Journal PHYSICS, MULTIDISCIPLINARY-

CiteScore

1.00

自引率

50.00%

发文量

208

审稿时长

3-6 weeks

期刊介绍： Russian Physics Journal covers the broad spectrum of specialized research in applied physics, with emphasis on work with practical applications in solid-state physics, optics, and magnetism. Particularly interesting results are reported in connection with: electroluminescence and crystal phospors; semiconductors; phase transformations in solids; superconductivity; properties of thin films; and magnetomechanical phenomena.