聚合物/PZT 复合微机电系统致动器阻尼膜材料的机械品质因数评估

IF 2.5 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2024-08-13 DOI:10.1109/JMEMS.2024.3436865

Xuchen Wang;Yukio Suzuki;Chung-Min Li;Shuji Tanaka

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引用次数: 0

摘要

本文报告了对可用作微机电系统阻尼材料的聚合物薄膜的机械品质因数（Q_{m}$）的实验估算。考虑到在微机电系统设备中的应用，使用两种厚光刻胶（TMMR-NA1000 和 SU8）和 PDMS 制作了聚合物/PZT 复合致动器，并在真空环境中评估了 Q 因子。通过比较测量和模拟的 Q 值，证实 TMMR-NA1000 的 Q 值范围为 14-18，SU8 为 13-20，而 PDMS 为 5-8，这表明 PDMS 的阻尼能力更强。此外，研究还发现，本研究中使用的 PZT 薄膜在 2 Vpp、+1V 直流偏移的驱动电压下，Q_{m}$ 为 200-220。为评估聚合物材料的 $Q_{m}$ 而开发的评估方法简单明了、易于实施，并且具有广泛的结构适用性，为评估各种材料提供了一种前景广阔的工具。[2024-0096]

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Mechanical Quality Factor Evaluation of Damping Film Materials for Polymer/PZT Composite MEMS Actuator

This paper reports the experimental estimation of the mechanical quality factor (

$Q_{m}$

) of polymer films, which can be used as damping materials for MEMS. Considering the application to MEMS devices, polymer/PZT composite actuators using two thick photoresists (TMMR-NA1000 and SU8) and PDMS were fabricated and the Q factors were evaluated in a vacuum environment. The comparison between the measured and simulated Q factor confirmed a

$Q_{m}$

range of 14-18 for TMMR-NA1000, 13-20 for SU8, and 5-8 for PDMS, indicating the superior damping capability of PDMS. Additionally, it was also found that the PZT thin film used in this study exhibited

$Q_{m}$

of 200-220 under the driving voltage of 2 Vpp with +1V DC offset. The evaluation approach developed for assessing

$Q_{m}$

of polymer materials is straightforward, easily implementable, and has broad structure applicability, offering a promising tool for assessing a wide array of materials. [2024-0096]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.