工艺参数对用作有机发光二极管电极的非反应性射频磁控溅射氧化铟锡薄膜特性的影响

IF 2.4 4区材料科学 Q2 CRYSTALLOGRAPHY

Crystals Pub Date : 2024-08-30 DOI:10.3390/cryst14090776

Claudia Diletto, Fiorita Nunziata, Salvatore Aprano, Ludovico Migliaccio, Maria Grazia Maglione, Alfredo Rubino, Paolo Tassini

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引用次数: 0

摘要

氧化铟锡（ITO）是一种透明导电氧化物（TCO），常用于实现至少需要一个透明电极的光电设备。在这项工作中，通过非反应射频磁控溅射法在玻璃基底上沉积了 ITO 薄膜，研究了功率密度、溅射压力和基底温度对所生长薄膜的电气、光学和结构特性的影响。在结晶度、透明度和导电性等方面都获得了高质量的薄膜。在氩气压力为 6.9 毫巴、溅射功率密度为 2.19 瓦/平方厘米、未进行退火后处理的氧化环境下，于 225 °C 生长的 120 nm 厚 ITO 薄膜在 550 nm 波长处的光学透过率接近 90%，电阻率为 2.10×10-4 Ω cm。这种材料被用作结构简单的有机发光二极管（OLED）的电极。

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Influence of Process Parameters on Properties of Non-Reactive RF Magnetron-Sputtered Indium Tin Oxide Thin Films Used as Electrodes for Organic Light-Emitting Diodes

Indium tin oxide (ITO) is a transparent conductive oxide (TCO) commonly used in the realization of optoelectronic devices needing at least a transparent electrode. In this work, ITO thin films were deposited on glass substrates by non-reactive RF magnetron sputtering, investigating the effects of power density, sputtering pressure, and substrate temperature on the electrical, optical, and structural properties of the as-grown films. High-quality films, in terms of crystallinity, transparency, and conductivity were obtained. The 120 nm thick ITO films grown at 225 °C under an argon pressure of 6.9 mbar and a sputtering power density of 2.19 W/cm2 without post-annealing treatments in an oxidizing environment showed an optical transmittance near 90% at 550 nm and a resistivity of 2.10×10−4 Ω cm. This material was applied as the electrode of simple-structure organic light-emitting diodes (OLEDs).

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来源期刊

Crystals CRYSTALLOGRAPHYMATERIALS SCIENCE, MULTIDIS-MATERIALS SCIENCE, MULTIDISCIPLINARY

CiteScore

4.20

自引率

11.10%

发文量

1527

审稿时长

16.12 days

期刊介绍： Crystals (ISSN 2073-4352) is an open access journal that covers all aspects of crystalline material research. Crystals can act as a reference, and as a publication resource, to the community. It publishes reviews, regular research articles, and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. Therefore, there is no restriction on article length. Full experimental details must be provided to enable the results to be reproduced. Crystals provides a forum for the advancement of our understanding of the nucleation, growth, processing, and characterization of crystalline materials. Their mechanical, chemical, electronic, magnetic, and optical properties, and their diverse applications, are all considered to be of importance.