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引用次数: 0
摘要
在这项研究中,我们展示了利用纳米压印技术制造波导谐振器的方法。在不依赖电子束光刻或步进光刻等传统昂贵光刻方法的情况下,通过纳米压印光刻技术可以在 C 波段实现质量系数高达 105 的氮化硅(Si3N4)谐振器。此外,通过适当设计波导几何形状,还可实现低色散波导,在正常色散机制下,波导色散约为-35 ps/nm/km,而在反常色散机制下,利用聚合物包层可将波导色散进一步调整为 29 ps/nm/km。借助微加热器,纳米压印器件的可调性得到了验证,从而实现了片上光学功能。这项工作为以一种极具成本效益且工艺友好的方案制造用于集成调制器和滤波器的低色散波导谐振器提供了可能性。
Low-dispersive silicon nitride waveguide resonators by nanoimprint lithography
In this study, we demonstrate the fabrication of waveguide resonators using nanoimprint technology. Without relying on traditionally costly lithography methods, such as electron-beam lithography or stepper lithography, silicon nitride (Si3N4) resonators with high-quality factors up to the order of 105 can be realized at C-band by nanoimprint lithography. In addition, by properly designing the waveguide geometry, a low-dispersive waveguide can be achieved with waveguide dispersion at around −35 ps/nm/km in the normal dispersion regime, and the waveguide dispersion can be further tuned to be 29 ps/nm/km in the anomalous dispersion regime with the polymer cladding. The tunability of nanoimprinted devices is demonstrated by the aid of microheaters, realizing on-chip optical functionalities. This work offers the potential to fabricate low-dispersive waveguide resonators for integrated modulators and filters in a significantly cost-effective and process-friendly scheme.
APL PhotonicsPhysics and Astronomy-Atomic and Molecular Physics, and Optics
CiteScore
10.30
自引率
3.60%
发文量
107
审稿时长
19 weeks
期刊介绍:
APL Photonics is the new dedicated home for open access multidisciplinary research from and for the photonics community. The journal publishes fundamental and applied results that significantly advance the knowledge in photonics across physics, chemistry, biology and materials science.