具有增强微观结构的 c 平面蓝宝石上的α-Ta 薄膜

IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
APL Materials Pub Date : 2024-09-06 DOI:10.1063/5.0218021
Lena N. Majer, Sander Smink, Wolfgang Braun, Bernhard Fenk, Varun Harbola, Benjamin Stuhlhofer, Hongguang Wang, Peter A. van Aken, Jochen Mannhart, Felix V. E. Hensling
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引用次数: 0

摘要

α-Ta超导薄膜是制造先进超导量子比特的理想候选材料。然而,α-Ta 薄膜存在许多生长引起的结构缺陷,对其性能产生了负面影响。因此,我们探索了一种新的α-Ta 薄膜合成方法,这种方法可以生长出质量前所未有的α-Ta 薄膜。使用这种方法,可以在 1150 °C 的较高基底温度下沉积出高质量的 α-Ta 薄膜。这些薄膜是单相α-Ta,具有单一的面外(110)取向。它们由≥2 μm的晶粒组成,这些晶粒具有三种可能的面内取向之一。扫描透射电子显微镜和电子能量损失研究表明,基底-薄膜界面清晰,没有可观察到的混杂现象。对准六边形基底上体心立方体薄膜外延生长的深入了解,为在各种应用中利用此类薄膜的高结构一致性奠定了基础。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
α-Ta films on c-plane sapphire with enhanced microstructure
Superconducting films of α-Ta are promising candidates for the fabrication of advanced superconducting qubits. However, α-Ta films suffer from many growth-induced structural inadequacies that negatively affect their performance. We have therefore explored a new synthesis method for α-Ta films, which allows for the growth of these films with an unprecedented quality. Using this method, high quality α-Ta films are deposited at a comparably high substrate temperature of 1150 °C. They are single-phase α-Ta and have a single out-of-plane (110) orientation. They consist of grains ≥2 μm that have one of three possible in-plane orientations. As shown by scanning transmission electron microscopy and electron energy loss studies, the substrate–film interfaces are sharp with no observable intermixing. The obtained insights into the epitaxial growth of body-centered-cubic films on quasi-hexagonal substrates lay the basis for harnessing the high structural coherence of such films in various applications.
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来源期刊
APL Materials
APL Materials NANOSCIENCE & NANOTECHNOLOGYMATERIALS SCIE-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
9.60
自引率
3.30%
发文量
199
审稿时长
2 months
期刊介绍: APL Materials features original, experimental research on significant topical issues within the field of materials science. In order to highlight research at the forefront of materials science, emphasis is given to the quality and timeliness of the work. The journal considers theory or calculation when the work is particularly timely and relevant to applications. In addition to regular articles, the journal also publishes Special Topics, which report on cutting-edge areas in materials science, such as Perovskite Solar Cells, 2D Materials, and Beyond Lithium Ion Batteries.
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