用于微区温度传感的 3D 打印微型磁性致动器

Sida Peng, Shengzhi Sun, Yi Zhu, Jianrong Qiu, Huayong Yang
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引用次数: 0

摘要

包含传感器的执行器已被开发用于各种应用。然而,在微米尺度上为微型高精度传感器配备致动器以实现微环境检测仍是一项挑战。在此,我们提出了一种二合一处理策略,以构建配备传感器的磁性致动器(SEMA)。磁性致动器的设计经过不断优化,以实现更小的阻力和更快的加速度。此外,还利用半导体量子点(QDs)随温度变化的特性制造了温度敏感单元(TSU),其灵敏度高达 111 pm ℃-1。最后,作为概念验证,实现了对微通道中任意微区的实时温度检测。这种为传感器配备微执行器的方法将在微环境传感、微机械操纵和微货物运输方面带来许多潜在应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

3D Printed Miniaturized Magnetic Actuator for Micro‐Area Temperature Sensing

3D Printed Miniaturized Magnetic Actuator for Micro‐Area Temperature Sensing
Actuators containing sensors are developed for various applications. However, it is still challenging to equip miniaturized high‐precision sensors with actuators at the micrometer scale to achieve micro‐environment detection. Here, a two‐in‐one processing strategy to construct a sensor‐equipped magnetic actuator (SEMA) is proposed. The design of magnetic actuators is continuously optimized to achieve less resistance and faster acceleration. Besides, the temperature‐dependent properties of semiconductor quantum dots (QDs) are used to fabricate the temperature‐sensitive unit (TSU), with a sensitivity of up to 111 pm °C−1. Finally, as a proof of concept, the real‐time temperature detection of arbitrary micro‐area in microchannels is achieved. This method of equipping sensors with microactuators will bring many potential applications in microenvironment sensing, micro‐mechanical manipulating, and microcargo transporting.
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