{"title":"带氧化物封盖层的 CoFeB 多层薄膜的磁性和介电特性","authors":"Yuting Liu;Sylvain Eimer;Jianyuan Zhao;Yiming Chen","doi":"10.1109/LMAG.2024.3459813","DOIUrl":null,"url":null,"abstract":"Ferromagnetic multilayer thin films with oxide capping layer have potential applications in voltage-controlled magnetic devices. Here, we present the optimization of the magnetic and dielectric properties of CoFeB/MgO thin films with different capping layers (Ta, Al\n<sub>2</sub>\nO\n<sub>3</sub>\n, and HfO\n<sub>2</sub>\n). We find that the samples with oxide capping layers show a higher perpendicular magnetic anisotropy (PMA) than those with a Ta capping layer. Meanwhile, a high dielectric constant of 58 is obtained in samples capped with 30 nm of HfO\n<sub>2</sub>\n. This high dielectric constant is attributed to the formation of an oxygen vacancy-related capacitive double layer in the HfO\n<sub>2</sub>\n film according to X-ray diffraction analyses and current–voltage measurements. Finally, we find that the optimal annealing temperature, which allows for both high PMA and dielectric constant, is between 250 °C and 290 °C. Our results could contribute to designing high-performance materials for controlling interfacial magnetic properties in novel spintronic devices.","PeriodicalId":1,"journal":{"name":"Accounts of Chemical Research","volume":null,"pages":null},"PeriodicalIF":16.4000,"publicationDate":"2024-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Magnetic and Dielectric Properties of CoFeB Multilayer Thin Films With Oxide Capping Layer\",\"authors\":\"Yuting Liu;Sylvain Eimer;Jianyuan Zhao;Yiming Chen\",\"doi\":\"10.1109/LMAG.2024.3459813\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Ferromagnetic multilayer thin films with oxide capping layer have potential applications in voltage-controlled magnetic devices. Here, we present the optimization of the magnetic and dielectric properties of CoFeB/MgO thin films with different capping layers (Ta, Al\\n<sub>2</sub>\\nO\\n<sub>3</sub>\\n, and HfO\\n<sub>2</sub>\\n). We find that the samples with oxide capping layers show a higher perpendicular magnetic anisotropy (PMA) than those with a Ta capping layer. Meanwhile, a high dielectric constant of 58 is obtained in samples capped with 30 nm of HfO\\n<sub>2</sub>\\n. This high dielectric constant is attributed to the formation of an oxygen vacancy-related capacitive double layer in the HfO\\n<sub>2</sub>\\n film according to X-ray diffraction analyses and current–voltage measurements. Finally, we find that the optimal annealing temperature, which allows for both high PMA and dielectric constant, is between 250 °C and 290 °C. Our results could contribute to designing high-performance materials for controlling interfacial magnetic properties in novel spintronic devices.\",\"PeriodicalId\":1,\"journal\":{\"name\":\"Accounts of Chemical Research\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":16.4000,\"publicationDate\":\"2024-09-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Accounts of Chemical Research\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10679049/\",\"RegionNum\":1,\"RegionCategory\":\"化学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"CHEMISTRY, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Accounts of Chemical Research","FirstCategoryId":"101","ListUrlMain":"https://ieeexplore.ieee.org/document/10679049/","RegionNum":1,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
摘要
带有氧化物覆盖层的铁磁多层薄膜在电压控制磁性器件中具有潜在的应用价值。在此,我们介绍了对具有不同覆盖层(Ta、Al2O3 和 HfO2)的 CoFeB/MgO 薄膜的磁性和介电性质的优化。我们发现,具有氧化物封盖层的样品比具有钽封盖层的样品显示出更高的垂直磁各向异性(PMA)。同时,用 30 nm 的 HfO2 覆层的样品获得了 58 的高介电常数。根据 X 射线衍射分析和电流电压测量,这一高介电常数归因于 HfO2 薄膜中形成了与氧空位相关的电容双层。最后,我们发现实现高 PMA 和介电常数的最佳退火温度介于 250 °C 和 290 °C 之间。我们的研究结果有助于设计高性能材料,以控制新型自旋电子器件的界面磁性能。
Magnetic and Dielectric Properties of CoFeB Multilayer Thin Films With Oxide Capping Layer
Ferromagnetic multilayer thin films with oxide capping layer have potential applications in voltage-controlled magnetic devices. Here, we present the optimization of the magnetic and dielectric properties of CoFeB/MgO thin films with different capping layers (Ta, Al
2
O
3
, and HfO
2
). We find that the samples with oxide capping layers show a higher perpendicular magnetic anisotropy (PMA) than those with a Ta capping layer. Meanwhile, a high dielectric constant of 58 is obtained in samples capped with 30 nm of HfO
2
. This high dielectric constant is attributed to the formation of an oxygen vacancy-related capacitive double layer in the HfO
2
film according to X-ray diffraction analyses and current–voltage measurements. Finally, we find that the optimal annealing temperature, which allows for both high PMA and dielectric constant, is between 250 °C and 290 °C. Our results could contribute to designing high-performance materials for controlling interfacial magnetic properties in novel spintronic devices.
期刊介绍:
Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance.
Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.