{"title":"用于无标记生物分子检测的基于双腔源口袋的电荷等离子体隧道场效应晶体管的建模和灵敏度估计","authors":"Shwetapadma Panda, Sidhartha Dash","doi":"10.1149/2162-8777/ad6a89","DOIUrl":null,"url":null,"abstract":"A dual-source cavity charge plasma tunneling FET (DSC-SP-CPTFET) with SiGe Pocket is proposed, and its effectiveness as a biological sensor for label-free detection is explored. The fabrication complexity and cost have been reduced by using the charge-plasma concept. For improved sensing, an etched nanocavity is added to the upper and lower of the source metal section. The high-<italic toggle=\"yes\">k</italic> (HfO<sub>2</sub>) gate oxide and minimal energy gap (Si<sub>0.6</sub>Ge<sub>0.4</sub>) alloy with a 40% mole fraction improve the current sensitivity by enhancing the drain current gradient. The sensitivity of the suggested biological sensor is assessed here for several neutral biological molecules, such as Gelatin, Keratin, Biotin, and 3-Aminopropyl-Triethoxysilane (APTES). Deoxyribonucleic acid (DNA), a charged biological molecule, is also considered with varying positive and negative charge densities. The suggested biological sensor shows a (S<sub>IDS</sub>)<sub>max</sub> of 2.21 × 10<sup>10</sup> and a S<sub>ratio</sub> of 3.11 × 10<sup>9</sup> for biological molecules with higher dielectric constant at room temperature. Different electrostatic performances are estimated in the ON state, including energy band, electron (e<sup>-</sup>) BTBT rate, electrical field, and I<sub>DS</sub>-V<sub>GS</sub> characteristics. In addition, the proposed biological sensor provides a much superior drain current sensitivity (S<sub>IDS</sub>), current ratio sensitivity (S<sub>ratio</sub>), and average SS sensitivity (S<sub>SS</sub>) performance in the presence of both charged and neutral biological molecules.","PeriodicalId":11496,"journal":{"name":"ECS Journal of Solid State Science and Technology","volume":"14 1","pages":""},"PeriodicalIF":1.8000,"publicationDate":"2024-08-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Modeling and Sensitivity Estimation of a Dual Cavity Source Pocket-Based Charge Plasma Tunneling FET for Label-Free Biological Molecule Detection\",\"authors\":\"Shwetapadma Panda, Sidhartha Dash\",\"doi\":\"10.1149/2162-8777/ad6a89\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A dual-source cavity charge plasma tunneling FET (DSC-SP-CPTFET) with SiGe Pocket is proposed, and its effectiveness as a biological sensor for label-free detection is explored. The fabrication complexity and cost have been reduced by using the charge-plasma concept. For improved sensing, an etched nanocavity is added to the upper and lower of the source metal section. The high-<italic toggle=\\\"yes\\\">k</italic> (HfO<sub>2</sub>) gate oxide and minimal energy gap (Si<sub>0.6</sub>Ge<sub>0.4</sub>) alloy with a 40% mole fraction improve the current sensitivity by enhancing the drain current gradient. The sensitivity of the suggested biological sensor is assessed here for several neutral biological molecules, such as Gelatin, Keratin, Biotin, and 3-Aminopropyl-Triethoxysilane (APTES). Deoxyribonucleic acid (DNA), a charged biological molecule, is also considered with varying positive and negative charge densities. The suggested biological sensor shows a (S<sub>IDS</sub>)<sub>max</sub> of 2.21 × 10<sup>10</sup> and a S<sub>ratio</sub> of 3.11 × 10<sup>9</sup> for biological molecules with higher dielectric constant at room temperature. Different electrostatic performances are estimated in the ON state, including energy band, electron (e<sup>-</sup>) BTBT rate, electrical field, and I<sub>DS</sub>-V<sub>GS</sub> characteristics. In addition, the proposed biological sensor provides a much superior drain current sensitivity (S<sub>IDS</sub>), current ratio sensitivity (S<sub>ratio</sub>), and average SS sensitivity (S<sub>SS</sub>) performance in the presence of both charged and neutral biological molecules.\",\"PeriodicalId\":11496,\"journal\":{\"name\":\"ECS Journal of Solid State Science and Technology\",\"volume\":\"14 1\",\"pages\":\"\"},\"PeriodicalIF\":1.8000,\"publicationDate\":\"2024-08-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ECS Journal of Solid State Science and Technology\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1149/2162-8777/ad6a89\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ECS Journal of Solid State Science and Technology","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1149/2162-8777/ad6a89","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Modeling and Sensitivity Estimation of a Dual Cavity Source Pocket-Based Charge Plasma Tunneling FET for Label-Free Biological Molecule Detection
A dual-source cavity charge plasma tunneling FET (DSC-SP-CPTFET) with SiGe Pocket is proposed, and its effectiveness as a biological sensor for label-free detection is explored. The fabrication complexity and cost have been reduced by using the charge-plasma concept. For improved sensing, an etched nanocavity is added to the upper and lower of the source metal section. The high-k (HfO2) gate oxide and minimal energy gap (Si0.6Ge0.4) alloy with a 40% mole fraction improve the current sensitivity by enhancing the drain current gradient. The sensitivity of the suggested biological sensor is assessed here for several neutral biological molecules, such as Gelatin, Keratin, Biotin, and 3-Aminopropyl-Triethoxysilane (APTES). Deoxyribonucleic acid (DNA), a charged biological molecule, is also considered with varying positive and negative charge densities. The suggested biological sensor shows a (SIDS)max of 2.21 × 1010 and a Sratio of 3.11 × 109 for biological molecules with higher dielectric constant at room temperature. Different electrostatic performances are estimated in the ON state, including energy band, electron (e-) BTBT rate, electrical field, and IDS-VGS characteristics. In addition, the proposed biological sensor provides a much superior drain current sensitivity (SIDS), current ratio sensitivity (Sratio), and average SS sensitivity (SSS) performance in the presence of both charged and neutral biological molecules.
期刊介绍:
The ECS Journal of Solid State Science and Technology (JSS) was launched in 2012, and publishes outstanding research covering fundamental and applied areas of solid state science and technology, including experimental and theoretical aspects of the chemistry and physics of materials and devices.
JSS has five topical interest areas:
carbon nanostructures and devices
dielectric science and materials
electronic materials and processing
electronic and photonic devices and systems
luminescence and display materials, devices and processing.