{"title":"计算电容式微机械超声换能器 (CMUT) 特性的快速准确工具","authors":"A. E. Biriukov","doi":"10.1134/S1547477124701139","DOIUrl":null,"url":null,"abstract":"<p>A new methodology for calculation of technical characteristics of electrostatic transducers has been developed, particularly, for capacitive micromachined ultrasound transducers (CMUT). It is based on a representation of the transducer as a flat capacitor with isotropic monolayer movable plate. Its displacement profile is calculated throughout superposition of its eigenmode responses to an applied voltage. The calculated displacement is used for determination of acoustic pressure in far-filed of an array of the similar transducers, vibrating in phase. Such a methodology makes it possible to calculate the frequency response and the radiation pattern even for a huge array of cells. It shows good accuracy in comparison to the finite element method (FEM), but is faster by an order of two.</p>","PeriodicalId":730,"journal":{"name":"Physics of Particles and Nuclei Letters","volume":"21 4","pages":"705 - 707"},"PeriodicalIF":0.4000,"publicationDate":"2024-08-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Fast and Accurate Tool for Calculation of Characteristics of Capacitive Micromachined Ultrasound Transducers (CMUT)\",\"authors\":\"A. E. Biriukov\",\"doi\":\"10.1134/S1547477124701139\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>A new methodology for calculation of technical characteristics of electrostatic transducers has been developed, particularly, for capacitive micromachined ultrasound transducers (CMUT). It is based on a representation of the transducer as a flat capacitor with isotropic monolayer movable plate. Its displacement profile is calculated throughout superposition of its eigenmode responses to an applied voltage. The calculated displacement is used for determination of acoustic pressure in far-filed of an array of the similar transducers, vibrating in phase. Such a methodology makes it possible to calculate the frequency response and the radiation pattern even for a huge array of cells. It shows good accuracy in comparison to the finite element method (FEM), but is faster by an order of two.</p>\",\"PeriodicalId\":730,\"journal\":{\"name\":\"Physics of Particles and Nuclei Letters\",\"volume\":\"21 4\",\"pages\":\"705 - 707\"},\"PeriodicalIF\":0.4000,\"publicationDate\":\"2024-08-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Physics of Particles and Nuclei Letters\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://link.springer.com/article/10.1134/S1547477124701139\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, PARTICLES & FIELDS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Physics of Particles and Nuclei Letters","FirstCategoryId":"1085","ListUrlMain":"https://link.springer.com/article/10.1134/S1547477124701139","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, PARTICLES & FIELDS","Score":null,"Total":0}
A Fast and Accurate Tool for Calculation of Characteristics of Capacitive Micromachined Ultrasound Transducers (CMUT)
A new methodology for calculation of technical characteristics of electrostatic transducers has been developed, particularly, for capacitive micromachined ultrasound transducers (CMUT). It is based on a representation of the transducer as a flat capacitor with isotropic monolayer movable plate. Its displacement profile is calculated throughout superposition of its eigenmode responses to an applied voltage. The calculated displacement is used for determination of acoustic pressure in far-filed of an array of the similar transducers, vibrating in phase. Such a methodology makes it possible to calculate the frequency response and the radiation pattern even for a huge array of cells. It shows good accuracy in comparison to the finite element method (FEM), but is faster by an order of two.
期刊介绍：
The journal Physics of Particles and Nuclei Letters, brief name Particles and Nuclei Letters, publishes the articles with results of the original theoretical, experimental, scientific-technical, methodological and applied research. Subject matter of articles covers: theoretical physics, elementary particle physics, relativistic nuclear physics, nuclear physics and related problems in other branches of physics, neutron physics, condensed matter physics, physics and engineering at low temperatures, physics and engineering of accelerators, physical experimental instruments and methods, physical computation experiments, applied research in these branches of physics and radiology, ecology and nuclear medicine.
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