Research on performance of porous scaffold-based getter activated by induction heating and its application in MEMS device

Non-evaporable getter (NEG) is widely used in vacuum packaging. However, there are two main contradictions. Firstly, the contradiction between bonding temperature of the device and activation temperature of the getter results in the getter being activated first and then packaged, and cannot be repeatedly activated, which seriously reduces the adsorption capacity and life of the getter. Secondly, the contradiction between the small package volume and the large adsorption capacity, how to integrate large adsorption capacity getter in a small space is a tricky problem. In view of the above contradictions, a porous scaffold-based getter activated by induction heating was proposed in this paper, results show that when nickel plating is used as the induction heating layer, the temperature can quickly rise to 700 °C within 10 s, and 1 μm Ti getter can be fully activated for 7 min. The good periodicity of the temperature curves proved that the nickel layer has good repeatable heating characteristics. In addition, the adsorption performance of the getter was tested and characterized at device level. The device level characterization of optical deflection method proves the effectiveness of induction heating to activate getter, which lays a foundation for the application of getter on MEMS devices.