二维云母的破坏性介电击穿

IF 3.5 2区 物理与天体物理 Q2 PHYSICS, APPLIED
A. Maruvada, S. J. O'Shea, J. Deng, K. Shubhakar, N. Raghavan, K. L. Pey
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引用次数: 0

摘要

本研究调查了范德华栅介质二维麝香云母(4-12 nm 厚)中的破坏性击穿(DBD)现象,重点关注其作为栅介质材料的电气可靠性。对电容器测试结构进行了电应力测试,并使用原子力显微镜分析了测试结果对物理结构的影响。结果发现了 DBD 事件中被去除的材料体积,并计算了使该体积气化所需的能量 (Ereq)。研究发现,Ereq 与击穿 (BD) 期间电容器中耗散的平均电能成正比,这表明 DBD 期间造成的损坏与 BD 位置的电流直接相关。与其他薄膜电介质相比,二维云母即使在很低的电流密度(<1 A/cm2)下也极易发生 DBD,而且突然的破坏性 BD 更类似于厚膜电介质击穿。对这些发现提出的解释是,插层 K+ 离子聚集在电应力产生的缺陷周围,使 BD 位置附近的缺陷密度大幅增加,从而导致电流增加,并在 BD 事件后产生相关焦耳热。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Destructive dielectric breakdown of 2D muscovite mica
This study investigates the destructive breakdown (DBD) phenomenon in the van der Waals gate dielectric 2D muscovite mica (4–12 nm thick), focusing on its electrical reliability as a gate dielectric material. Capacitor test structures were electrically stressed, and the resulting impact on the physical structure was analyzed using atomic force microscopy. The volume of material removed in a DBD event is found, and the energy required (Ereq) to vaporize the volume was calculated. It is found that Ereq is proportional to the average electrical energy dissipated in the capacitor during breakdown (BD), indicating a direct correlation between damage caused during DBD and the current flow at BD location. In contrast to other thin film dielectrics, the 2D mica is highly susceptible to DBD even at very low current density (<1 A/cm2) and the abrupt, destructive BD more resembles that of thick film dielectric breakdown. An explanation for these finding is proposed in which intercalated K+ ions agglomerate around defects generated by the electrical stressing such that the defect density increases substantially in the local vicinity of BD locations, which leads to increased current and associated Joule heating after the BD event.
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来源期刊
Applied Physics Letters
Applied Physics Letters 物理-物理:应用
CiteScore
6.40
自引率
10.00%
发文量
1821
审稿时长
1.6 months
期刊介绍: Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.
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