基于热力学的半导体加工设备用阳极氧化铝密封方法

IF 11.2 1区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Journal of Materials Science & Technology Pub Date : 2024-09-01 DOI:10.1016/j.jmst.2024.08.010

Yuhang Wang, Yang Zhao, Shaogang Wang, Ji Chen, Tao Zhang, Fuhui Wang

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引用次数: 0

摘要

提出了一种设计用于密封半导体加工设备中使用的阳极氧化铝的方法的原理。热力学计算和菲克第二定律用于揭示金属离子沉积、沉积产物稳定性、选定金属离子的卤化物蒸气压、保持温度和时间的趋势。此外，还揭示了离子浓度与密封温度之间的相互作用。根据设计原理，将阳极氧化铝浸入 1 mM Cr3+ 离子溶液中并蒸汽密封 18 小时后，当其暴露在 5 wt.% HCl 溶液和 HCl 气体中时，表现出最高的耐腐蚀性，验证了设计结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Thermodynamics-based sealing method for anodized aluminum used in semiconductor processing apparatuses

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Thermodynamics-based sealing method for anodized aluminum used in semiconductor processing apparatuses

A principle was proposed for designing a method to seal anodized aluminum used in semiconductor processing apparatuses. Thermodynamic calculations and Fick's second law were used to reveal trends in the metal ion deposition, deposition product stability, vapor pressures of halides for selected metal ions, the holding temperature, and time. Interactions between ion concentrations and the sealing temperature were also revealed. According to the design principles, anodized aluminum dipped in 1 mM Cr³⁺ ion solution and steam-sealed for 18 h exhibited the highest corrosion resistance when exposed to 5 wt.% HCl solution and HCl gas, verifying the designed results.

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来源期刊

Journal of Materials Science & Technology 工程技术-材料科学：综合

CiteScore

20.00

自引率

11.00%

发文量

995

审稿时长

13 days

期刊介绍： Journal of Materials Science & Technology strives to promote global collaboration in the field of materials science and technology. It primarily publishes original research papers, invited review articles, letters, research notes, and summaries of scientific achievements. The journal covers a wide range of materials science and technology topics, including metallic materials, inorganic nonmetallic materials, and composite materials.