Close Range and High-Resolution Detection of Vibration by Ultrasonic Wave Using Silicon-on-Nothing PMUTs

This article presents a novel method for close-range, high-resolution ultrasonic time-of-flight (ToF) ranging using piezoelectric micromachined ultrasonic transducers (PMUTs) operating below the device resonance in air. The proposed method involves cross correlation techniques to accurately detect the reflected echo signals despite the presence of ringdown signal interference. For the experiments, a high fill-factor array of silicon-on-nothing (SON) PMUTs was used to enhance the signal-to-noise ratio (SNR). A thorough investigation was conducted to determine the optimal driving frequency for below-resonance ToF ranging, to improve resolution and minimize detection errors. The results of the experiments showed that the system was able to accurately measure sub- $\mu $ m vibrations of a metal plate placed 13 mm away from the PMUT array. The system exhibited the ability to detect target object vibrations with a peak-to-peak displacement under $6~\mu $ m and sub- $\mu $ m floor noise. Moreover, the maximum detectable vibration frequency reached up to 1 kHz. This study highlights the potential of the proposed ToF ranging method in noncontact vibration monitoring applications across various fields, such as robotics and predictive maintenance.