评估环氧树脂涂层单晶 SiC 的研磨性能和去除机理

IF 6.1 1区工程技术 Q1 ENGINEERING, MECHANICAL

Tribology International Pub Date : 2024-08-21 DOI:10.1016/j.triboint.2024.110147

{"title":"评估环氧树脂涂层单晶 SiC 的研磨性能和去除机理","authors":"","doi":"10.1016/j.triboint.2024.110147","DOIUrl":null,"url":null,"abstract":"<div>The inherent hardness and brittleness of single crystal silicon carbide (SiC) materials pose challenges in processing high-quality surface products from SiC. To overcome these challenges, an epoxy resin coated grinding method for SiC was developed and employed in this study. The objective was to investigate how the width (d) and thickness (h) of the epoxy resin coating affect the quality of the ground surface. The research indicated that as d increased from 0 to 2.5 mm, the average surface roughness (Ra) of SiC decreased from 57 to 32 nm. Similarly, as h increased from 0 to 0.8 mm, the average Ra decreased from 53 to 31 nm.</div>","PeriodicalId":23238,"journal":{"name":"Tribology International","volume":null,"pages":null},"PeriodicalIF":6.1000,"publicationDate":"2024-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Evaluation of grinding performance and removal mechanism of epoxy resin coated single crystal SiC\",\"authors\":\"\",\"doi\":\"10.1016/j.triboint.2024.110147\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div>The inherent hardness and brittleness of single crystal silicon carbide (SiC) materials pose challenges in processing high-quality surface products from SiC. To overcome these challenges, an epoxy resin coated grinding method for SiC was developed and employed in this study. The objective was to investigate how the width (d) and thickness (h) of the epoxy resin coating affect the quality of the ground surface. The research indicated that as d increased from 0 to 2.5 mm, the average surface roughness (Ra) of SiC decreased from 57 to 32 nm. Similarly, as h increased from 0 to 0.8 mm, the average Ra decreased from 53 to 31 nm.</div>\",\"PeriodicalId\":23238,\"journal\":{\"name\":\"Tribology International\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":6.1000,\"publicationDate\":\"2024-08-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Tribology International\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0301679X24008995\",\"RegionNum\":1,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, MECHANICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Tribology International","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0301679X24008995","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}

引用次数: 0

摘要

单晶碳化硅（SiC）材料固有的硬度和脆性给加工高质量的碳化硅表面产品带来了挑战。为了克服这些挑战，本研究开发并采用了环氧树脂涂层碳化硅研磨方法。目的是研究环氧树脂涂层的宽度（d）和厚度（h）如何影响研磨表面的质量。研究表明，随着 d 从 0 mm 增加到 2.5 mm，SiC 的平均表面粗糙度 (Ra) 从 57 nm 下降到 32 nm。同样，当 h 从 0 毫米增加到 0.8 毫米时，平均 Ra 从 53 纳米下降到 31 纳米。

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Evaluation of grinding performance and removal mechanism of epoxy resin coated single crystal SiC

The inherent hardness and brittleness of single crystal silicon carbide (SiC) materials pose challenges in processing high-quality surface products from SiC. To overcome these challenges, an epoxy resin coated grinding method for SiC was developed and employed in this study. The objective was to investigate how the width (d) and thickness (h) of the epoxy resin coating affect the quality of the ground surface. The research indicated that as d increased from 0 to 2.5 mm, the average surface roughness (Ra) of SiC decreased from 57 to 32 nm. Similarly, as h increased from 0 to 0.8 mm, the average Ra decreased from 53 to 31 nm.

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来源期刊

Tribology International 工程技术-工程：机械

CiteScore

10.10

自引率

16.10%

发文量

627

审稿时长

35 days

期刊介绍： Tribology is the science of rubbing surfaces and contributes to every facet of our everyday life, from live cell friction to engine lubrication and seismology. As such tribology is truly multidisciplinary and this extraordinary breadth of scientific interest is reflected in the scope of Tribology International. Tribology International seeks to publish original research papers of the highest scientific quality to provide an archival resource for scientists from all backgrounds. Written contributions are invited reporting experimental and modelling studies both in established areas of tribology and emerging fields. Scientific topics include the physics or chemistry of tribo-surfaces, bio-tribology, surface engineering and materials, contact mechanics, nano-tribology, lubricants and hydrodynamic lubrication.