V. A. Zhernova, Yu. A. Volkovsky, M. S. Folomeshkin, A. Yu. Seregin, P. A. Prosekov, A. E. Muslimov, A. V. Butashin, A. M. Ismailov, Yu. V. Grigoriev, Yu. V. Pisarevsky, V. M. Kanevsky, A. E. Blagov, M. V. Kovalchuk
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引用次数: 0
摘要
摘要 介绍了在六铝酸镧镁芯片和带金缓冲层的蓝宝石衬底表面上通过磁控沉积获得的氧化锌薄膜样品结构特征的研究结果。分析薄膜的结构和形态采用了一系列方法，包括高分辨率 X 射线衍射测量法、极坐标法和透射电子显微镜。结果表明，在使用六铝酸镧镁的裂隙时，形成的氧化锌外延薄膜没有生长旋转畴的迹象。在蓝宝石衬底上生长过程中使用金缓冲层可提高氧化锌薄膜的结晶质量，但不能完全抑制畴生长。
X-Ray- and Synchrotron-Radiation Study of the Defect Structure of Epitaxial ZnO Films Grown by Magnetron Deposition on Al2O3 and LaMgAl11O19 Substrates with (0001) Orientation
The results of studying the structural features of samples of zinc-oxide films obtained by magnetron deposition on chips of lanthanum-magnesium hexaaluminate and the surface of sapphire substrates with a gold buffer layer are presented. Analysis of the structure and morphology of the films is carried out using a set of methods, including high-resolution X-ray diffractometry, the method of constructing pole figures, and transmission electron microscopy. It is shown that when using cleavages of lanthanum-magnesium hexaaluminate, an epitaxial ZnO film is formed without signs of growth rotating domains. The use of a gold buffer layer during growth on sapphire substrates improves the crystalline quality of ZnO films, but does not completely suppress domain growth.
期刊介绍：
Nanobiotechnology Reports publishes interdisciplinary research articles on fundamental aspects of the structure and properties of nanoscale objects and nanomaterials, polymeric and bioorganic molecules, and supramolecular and biohybrid complexes, as well as articles that discuss technologies for their preparation and processing, and practical implementation of products, devices, and nature-like systems based on them. The journal publishes original articles and reviews that meet the highest scientific quality standards in the following areas of science and technology studies: self-organizing structures and nanoassemblies; nanostructures, including nanotubes; functional and structural nanomaterials; polymeric, bioorganic, and hybrid nanomaterials; devices and products based on nanomaterials and nanotechnology; nanobiology and genetics, and omics technologies; nanobiomedicine and nanopharmaceutics; nanoelectronics and neuromorphic computing systems; neurocognitive systems and technologies; nanophotonics; natural science methods in a study of cultural heritage items; metrology, standardization, and monitoring in nanotechnology.
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