Sergiy Bogatyrenko, Pavlo Kryshtal, Adam Gruszczyński, A. Kryshtal
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引用次数: 0
摘要
我们研究了与 Bi 接触的 Ge 薄膜从非晶到晶体转变过程中形成可蜕变 BiGe 固相的机制和动力学。本研究采用了在无定形 Ge 薄膜之间夹有一层 Bi 薄膜的 Ge/Bi/Ge 夹层薄膜,这些薄膜是通过在真空中依次沉积各组分而制成的。夹层薄膜的总厚度和成分变化范围分别为 30 至 400 nm 和 22 至 48 wt% Bi。我们使用电子衍射、高分辨率 (S)TEM 成像、EDX 和 EEL 光谱对 20-271 ℃ 温度范围内的 Ge/Bi/Ge 薄膜的形态、成分和结构进行了原位和非原位表征。我们证明了在低温处理过程中形成了含铋高达 28 wt% 的多晶 Ge 薄膜。相互作用过程在温度≈150 °C时被激活,导致Ge结晶,同时在温度≈210 °C时在薄膜的整个体积中形成准均质过饱和固溶体。我们的研究表明,结晶 Ge 薄膜的形成与 Bi 固溶性的扩展主要取决于三层薄膜的整体组成。我们讨论了金属诱导无定形锗结晶在形成过饱和固相中的作用。
Formation of Metastable Solid Solutions in Bi-Ge Films during Low-Temperature Treatment
We investigated the mechanism and kinetics of the formation of metastable BiGe solid phases during the amorphous-to-crystalline transformation of Ge films in contact with Bi. Ge/Bi/Ge sandwich films with a Bi film between amorphous Ge films, which were fabricated by sequential deposition of the components in a vacuum, were used in this study. The total thickness and composition of the sandwich films varied in the range from 30 to 400 nm and from 22 to 48 wt% Bi, respectively. Electron diffraction, high-resolution (S)TEM imaging, EDX, and EEL spectroscopy were used for in situ and ex situ characterization of the morphology, composition, and structure of Ge/Bi/Ge films in the temperature range of 20–271 °C. We proved the formation of polycrystalline Ge films containing up to 28 wt% Bi during low-temperature treatment. The interaction process was activated at ≈150 °C, resulting in the crystallization of Ge with the simultaneous formation of a quasi-homogeneous supersaturated solid solution throughout the entire volume of the film at ≈210 °C. We showed that the formation of crystalline Ge films with an extended solid solubility of Bi depended mostly on the overall composition of the tri-layer film. The role of metal-induced crystallization of the amorphous germanium in the formation of the supersaturated solid phases is discussed.
期刊介绍:
Metals (ISSN 2075-4701) is an open access journal of related scientific research and technology development. It publishes reviews, regular research papers (articles) and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. Therefore, there is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced. Metals provides a forum for publishing papers which advance the in-depth understanding of the relationship between the structure, the properties or the functions of all kinds of metals.