在 65 纳米 CMOS 成像工艺中采用片内运算放大器的模拟像素测试结构的时间性能

Gianluca Aglieri Rinella, Luca Aglietta, Matias Antonelli, Francesco Barile, Franco Benotto, Stefania Maria Beolè, Elena Botta, Giuseppe Eugenio Bruno, Francesca Carnesecchi, Domenico Colella, Angelo Colelli, Giacomo Contin, Giuseppe De Robertis, Florina Dumitrache, Domenico Elia, Chiara Ferrero, Martin Fransen, Alex Kluge, Shyam Kumar, Corentin Lemoine, Francesco Licciulli, Bong-Hwi Lim, Flavio Loddo, Magnus Mager, Davide Marras, Paolo Martinengo, Cosimo Pastore, Rajendra Nath Patra, Stefania Perciballi, Francesco Piro, Francesco Prino, Luciano Ramello, Arianna Grisel Torres Ramos, Felix Reidt, Roberto Russo, Valerio Sarritzu, Umberto Savino, David Schledewitz, Mariia Selina, Serhiy Senyukov, Mario Sitta, Walter Snoeys, Jory Sonneveld, Miljenko Suljic, Triloki Triloki, Andrea Turcato
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引用次数: 0

摘要

在欧洲核子研究中心(CERN)EP 单片传感器研发和 ALICE ITS3 升级的背景下,Tower Partners Semiconductor Co (TPSCo) 65 纳米工艺已通过高能物理应用认证,并被 ALICE ITS3 升级所采用。模拟像素测试结构(APTS)的特点是为一个四乘四像素的小矩阵提供快速的基于每个像素工作放大器的缓冲,并设计了一个具有小收集电极和非常非均方电场的传感器,以便详细鉴定该技术的像素性能。使用(120 GeV/$c$)正向强子束对该芯片的几种不同像素设计的变体进行了表征。结果表明,性能最好的 APTS-OA 原型变体的时间分辨率为 63 ps,探测效率超过 99%,空间分辨率为 2 $\mu$m,凸显了 TPSCo 65nm CMOS 成像技术在高能物理和其他需要精确时间测量、高探测效率和出色空间分辨率的领域的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Time performance of Analog Pixel Test Structures with in-chip operational amplifier implemented in 65 nm CMOS imaging process
In the context of the CERN EP R&D on monolithic sensors and the ALICE ITS3 upgrade, the Tower Partners Semiconductor Co (TPSCo) 65 nm process has been qualified for use in high energy physics, and adopted for the ALICE ITS3 upgrade. An Analog Pixel Test Structure (APTS) featuring fast per pixel operational-amplifier-based buffering for a small matrix of four by four pixels, with a sensor with a small collection electrode and a very non-uniform electric field, was designed to allow detailed characterization of the pixel performance in this technology. Several variants of this chip with different pixel designs have been characterized with a (120 GeV/$c$) positive hadron beam. This result indicates that the APTS-OA prototype variants with the best performance achieve a time resolution of 63 ps with a detection efficiency exceeding 99% and a spatial resolution of 2 $\mu$m, highlighting the potential of TPSCo 65nm CMOS imaging technology for high-energy physics and other fields requiring precise time measurement, high detection efficiency, and excellent spatial resolution.
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