利用 MEMS 共振传感器进行角度相关的平面内磁场探测

IF 2.1 3区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Magnetics Pub Date : 2024-07-22 DOI:10.1109/TMAG.2024.3432158

Yuxi Wang;Mingye Du;Jiawei Li;Daozheng Luo;Tao Wu

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引用次数: 0

摘要

微型压电/磁致伸缩谐振器已被证明是具有 $\Delta $ E 效应的有效磁力计。在这里，我们报告了紧凑型压电/磁致伸缩 Lamb 模式谐振器的磁场角敏感行为。利用磁光克尔效应（MOKE）显微镜，我们观察到了从 0° 到 90° 的面内角度的磁畴反转。这揭示了器件的残余磁化和矫顽力场对外部磁场的响应变化。此外，我们还分析了频率偏移对外部磁场方向的角度依赖性。在 90° 时，最大偏移约为 90 kHz。随着角度的减小，频率偏移逐渐减小，在 0° 时接近最小值。当磁场方向为 90° 时，MEMS 共振传感器的灵敏度最高，达到 25 Hz/ $\mu $ T。

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Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor

Miniaturized piezoelectric/magnetostrictive resonators have been proven to be effective magnetometers with the

$\Delta $

E effect. Here, we reported the magnetic field angle-sensitive behavior of compact piezoelectric/magnetostrictive Lamb mode resonators. Utilizing magneto-optic Kerr effect (MOKE) microscopy, we observed magnetic domain reversals over in-plane angles from 0° to 90°. This revealed shifts in remnant magnetizations and coercive fields of the device in response to the external magnetic field. Additionally, we analyzed the angle dependence of frequency shift on the external magnetic field directions. The largest shift was approximately 90 kHz at 90°. As the angle decreased, frequency shifts gradually reduced, approaching the minimal at 0°. The MEMS resonant sensor reached the highest sensitivity of 25 Hz/

$\mu $

T when the magnetic field was along at 90°.

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来源期刊

IEEE Transactions on Magnetics 工程技术-工程：电子与电气

CiteScore

4.00

自引率

14.30%

发文量

565

审稿时长

4.1 months

期刊介绍： Science and technology related to the basic physics and engineering of magnetism, magnetic materials, applied magnetics, magnetic devices, and magnetic data storage. The IEEE Transactions on Magnetics publishes scholarly articles of archival value as well as tutorial expositions and critical reviews of classical subjects and topics of current interest.