利用 MEMS 共振传感器进行角度相关的平面内磁场探测

IF 2.1 3区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Yuxi Wang;Mingye Du;Jiawei Li;Daozheng Luo;Tao Wu
{"title":"利用 MEMS 共振传感器进行角度相关的平面内磁场探测","authors":"Yuxi Wang;Mingye Du;Jiawei Li;Daozheng Luo;Tao Wu","doi":"10.1109/TMAG.2024.3432158","DOIUrl":null,"url":null,"abstract":"Miniaturized piezoelectric/magnetostrictive resonators have been proven to be effective magnetometers with the \n<inline-formula> <tex-math>$\\Delta $ </tex-math></inline-formula>\nE effect. Here, we reported the magnetic field angle-sensitive behavior of compact piezoelectric/magnetostrictive Lamb mode resonators. Utilizing magneto-optic Kerr effect (MOKE) microscopy, we observed magnetic domain reversals over in-plane angles from 0° to 90°. This revealed shifts in remnant magnetizations and coercive fields of the device in response to the external magnetic field. Additionally, we analyzed the angle dependence of frequency shift on the external magnetic field directions. The largest shift was approximately 90 kHz at 90°. As the angle decreased, frequency shifts gradually reduced, approaching the minimal at 0°. The MEMS resonant sensor reached the highest sensitivity of 25 Hz/\n<inline-formula> <tex-math>$\\mu $ </tex-math></inline-formula>\nT when the magnetic field was along at 90°.","PeriodicalId":13405,"journal":{"name":"IEEE Transactions on Magnetics","volume":null,"pages":null},"PeriodicalIF":2.1000,"publicationDate":"2024-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor\",\"authors\":\"Yuxi Wang;Mingye Du;Jiawei Li;Daozheng Luo;Tao Wu\",\"doi\":\"10.1109/TMAG.2024.3432158\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Miniaturized piezoelectric/magnetostrictive resonators have been proven to be effective magnetometers with the \\n<inline-formula> <tex-math>$\\\\Delta $ </tex-math></inline-formula>\\nE effect. Here, we reported the magnetic field angle-sensitive behavior of compact piezoelectric/magnetostrictive Lamb mode resonators. Utilizing magneto-optic Kerr effect (MOKE) microscopy, we observed magnetic domain reversals over in-plane angles from 0° to 90°. This revealed shifts in remnant magnetizations and coercive fields of the device in response to the external magnetic field. Additionally, we analyzed the angle dependence of frequency shift on the external magnetic field directions. The largest shift was approximately 90 kHz at 90°. As the angle decreased, frequency shifts gradually reduced, approaching the minimal at 0°. The MEMS resonant sensor reached the highest sensitivity of 25 Hz/\\n<inline-formula> <tex-math>$\\\\mu $ </tex-math></inline-formula>\\nT when the magnetic field was along at 90°.\",\"PeriodicalId\":13405,\"journal\":{\"name\":\"IEEE Transactions on Magnetics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.1000,\"publicationDate\":\"2024-07-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Magnetics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10606245/\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Magnetics","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10606245/","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0

摘要

微型压电/磁致伸缩谐振器已被证明是具有 $\Delta $ E 效应的有效磁力计。在这里,我们报告了紧凑型压电/磁致伸缩 Lamb 模式谐振器的磁场角敏感行为。利用磁光克尔效应(MOKE)显微镜,我们观察到了从 0° 到 90° 的面内角度的磁畴反转。这揭示了器件的残余磁化和矫顽力场对外部磁场的响应变化。此外,我们还分析了频率偏移对外部磁场方向的角度依赖性。在 90° 时,最大偏移约为 90 kHz。随着角度的减小,频率偏移逐渐减小,在 0° 时接近最小值。当磁场方向为 90° 时,MEMS 共振传感器的灵敏度最高,达到 25 Hz/ $\mu $ T。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Angle-Dependent In-Plane Magnetic Field Detection by MEMS Resonant Sensor
Miniaturized piezoelectric/magnetostrictive resonators have been proven to be effective magnetometers with the $\Delta $ E effect. Here, we reported the magnetic field angle-sensitive behavior of compact piezoelectric/magnetostrictive Lamb mode resonators. Utilizing magneto-optic Kerr effect (MOKE) microscopy, we observed magnetic domain reversals over in-plane angles from 0° to 90°. This revealed shifts in remnant magnetizations and coercive fields of the device in response to the external magnetic field. Additionally, we analyzed the angle dependence of frequency shift on the external magnetic field directions. The largest shift was approximately 90 kHz at 90°. As the angle decreased, frequency shifts gradually reduced, approaching the minimal at 0°. The MEMS resonant sensor reached the highest sensitivity of 25 Hz/ $\mu $ T when the magnetic field was along at 90°.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
IEEE Transactions on Magnetics
IEEE Transactions on Magnetics 工程技术-工程:电子与电气
CiteScore
4.00
自引率
14.30%
发文量
565
审稿时长
4.1 months
期刊介绍: Science and technology related to the basic physics and engineering of magnetism, magnetic materials, applied magnetics, magnetic devices, and magnetic data storage. The IEEE Transactions on Magnetics publishes scholarly articles of archival value as well as tutorial expositions and critical reviews of classical subjects and topics of current interest.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信