用有限元法研究带有二氧化硅薄膜的铌酸锂单晶中的表面声波特性

IF 0.6 4区材料科学 Q4 CRYSTALLOGRAPHY

Crystallography Reports Pub Date : 2024-07-25 DOI:10.1134/s1063774523600266

O. L. Balysheva, A. S. Koigerov, B. Ts. Rakshaev

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引用次数: 0

摘要

摘要计算了铌酸锂单晶/二氧化硅薄膜结构中的表面声波特性，该结构用于提高单晶基底上声电器件的热稳定性。模拟采用 COMSOL 软件的有限元法进行，并计算了不同切面铌酸锂结构中的速度、机电耦合系数和频率温度系数。所得结果与文献数据之间具有良好的一致性。所获得的参数对开发各种声电设备具有重要的实际意义。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Investigation of the Properties of Surface Acoustic Waves in a Lithium Niobate Single Crystal with a Silicon Dioxide Film by the Finite-Element Method

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Investigation of the Properties of Surface Acoustic Waves in a Lithium Niobate Single Crystal with a Silicon Dioxide Film by the Finite-Element Method

Abstract

Characteristics of surface acoustic waves in lithium niobate single crystal/silicon dioxide film structures, which are used to increase the thermal stability of acoustoelectric devices on single-crystal substrates, have been calculated. The simulation has been performed by the finite-element method using the COMSOL software, and the velocity, electromechanical coupling coefficient, and temperature coefficient of frequency in the structures with lithium niobate of different cuts have been calculated. A good agreement is observed between the results obtained and the data in the literature. The obtained parameters are of practical importance for developing various acoustoelectric devices.

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来源期刊

Crystallography Reports 化学-晶体学

CiteScore

1.10

自引率

28.60%

发文量

审稿时长

4-8 weeks

期刊介绍： Crystallography Reports is a journal that publishes original articles short communications, and reviews on various aspects of crystallography: diffraction and scattering of X-rays, electrons, and neutrons, determination of crystal structure of inorganic and organic substances, including proteins and other biological substances; UV-VIS and IR spectroscopy; growth, imperfect structure and physical properties of crystals; thin films, liquid crystals, nanomaterials, partially disordered systems, and the methods of studies.