通过氦等离子体辐照制造锗纳米结构

IF 1.5 4区物理与天体物理 Q3 PHYSICS, APPLIED

Japanese Journal of Applied Physics Pub Date : 2024-07-22 DOI:10.35848/1347-4065/ad5afe

Shin Kajita, Quan Shi, Kiho Tabata, Tatsuya Kuwabara, Hirohiko Tanaka and Noriyasu Ohno

{"title":"通过氦等离子体辐照制造锗纳米结构","authors":"Shin Kajita, Quan Shi, Kiho Tabata, Tatsuya Kuwabara, Hirohiko Tanaka and Noriyasu Ohno","doi":"10.35848/1347-4065/ad5afe","DOIUrl":null,"url":null,"abstract":"The effects of helium plasma irradiation, which has been widely studied on metals, on germanium have been experimentally investigated. The irradiation temperature ranges from 430 to 720 K, and the incident ion energy ranges from 30 to 100 eV. From the scanning electron microscope (SEM) observation, it was found that various morphological changes including pits, nanocones, nanopillars, and roughened surfaces occur. The spatial scale of the morphological change was analyzed by applying fast Fourier transform to SEM micrographs. Thermal desorption spectroscopy analysis suggests that He atoms implanted on Ge play major roles in forming roughened surfaces at a surface temperature higher than 500 K.","PeriodicalId":14741,"journal":{"name":"Japanese Journal of Applied Physics","volume":"67 1","pages":""},"PeriodicalIF":1.5000,"publicationDate":"2024-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Germanium nanostructures by helium plasma irradiation\",\"authors\":\"Shin Kajita, Quan Shi, Kiho Tabata, Tatsuya Kuwabara, Hirohiko Tanaka and Noriyasu Ohno\",\"doi\":\"10.35848/1347-4065/ad5afe\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The effects of helium plasma irradiation, which has been widely studied on metals, on germanium have been experimentally investigated. The irradiation temperature ranges from 430 to 720 K, and the incident ion energy ranges from 30 to 100 eV. From the scanning electron microscope (SEM) observation, it was found that various morphological changes including pits, nanocones, nanopillars, and roughened surfaces occur. The spatial scale of the morphological change was analyzed by applying fast Fourier transform to SEM micrographs. Thermal desorption spectroscopy analysis suggests that He atoms implanted on Ge play major roles in forming roughened surfaces at a surface temperature higher than 500 K.\",\"PeriodicalId\":14741,\"journal\":{\"name\":\"Japanese Journal of Applied Physics\",\"volume\":\"67 1\",\"pages\":\"\"},\"PeriodicalIF\":1.5000,\"publicationDate\":\"2024-07-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Japanese Journal of Applied Physics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.35848/1347-4065/ad5afe\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Japanese Journal of Applied Physics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.35848/1347-4065/ad5afe","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}

引用次数: 0

摘要

实验研究了氦等离子体辐照对锗的影响，氦等离子体辐照对金属的影响已被广泛研究。辐照温度范围为 430 至 720 K，入射离子能量范围为 30 至 100 eV。通过扫描电子显微镜（SEM）观察发现，锗上出现了各种形态变化，包括凹坑、纳米锥、纳米柱和粗糙表面。通过对扫描电子显微镜显微照片进行快速傅立叶变换，分析了形态变化的空间尺度。热解吸光谱分析表明，在表面温度高于 500 K 时，植入 Ge 的 He 原子在形成粗糙表面的过程中发挥了主要作用。

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Germanium nanostructures by helium plasma irradiation

The effects of helium plasma irradiation, which has been widely studied on metals, on germanium have been experimentally investigated. The irradiation temperature ranges from 430 to 720 K, and the incident ion energy ranges from 30 to 100 eV. From the scanning electron microscope (SEM) observation, it was found that various morphological changes including pits, nanocones, nanopillars, and roughened surfaces occur. The spatial scale of the morphological change was analyzed by applying fast Fourier transform to SEM micrographs. Thermal desorption spectroscopy analysis suggests that He atoms implanted on Ge play major roles in forming roughened surfaces at a surface temperature higher than 500 K.

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来源期刊

Japanese Journal of Applied Physics 物理-物理：应用

CiteScore

3.00

自引率

26.70%

发文量

818

审稿时长

3.5 months

期刊介绍： The Japanese Journal of Applied Physics (JJAP) is an international journal for the advancement and dissemination of knowledge in all fields of applied physics. JJAP is a sister journal of the Applied Physics Express (APEX) and is published by IOP Publishing Ltd on behalf of the Japan Society of Applied Physics (JSAP). JJAP publishes articles that significantly contribute to the advancements in the applications of physical principles as well as in the understanding of physics in view of particular applications in mind. Subjects covered by JJAP include the following fields: • Semiconductors, dielectrics, and organic materials • Photonics, quantum electronics, optics, and spectroscopy • Spintronics, superconductivity, and strongly correlated materials • Device physics including quantum information processing • Physics-based circuits and systems • Nanoscale science and technology • Crystal growth, surfaces, interfaces, thin films, and bulk materials • Plasmas, applied atomic and molecular physics, and applied nuclear physics • Device processing, fabrication and measurement technologies, and instrumentation • Cross-disciplinary areas such as bioelectronics/photonics, biosensing, environmental/energy technologies, and MEMS