英特尔的 2.5D Foveros 增加了一个电容器

IF 33.7 1区工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

Nature Electronics Pub Date : 2024-07-23 DOI:10.1038/s41928-024-01224-x

Katharina Zeissler

引用次数: 0

摘要

将芯片以三维（3D）方式堆叠成单个系统级封装，可以带来超越传统器件尺寸的扩展机会。在这种方法中，计算元件通过使用硅通孔（TSV）技术和微凸块的硅插层以面对面的芯片配置连接起来。然而，要在高性能工作负载期间实现良好的响应速度和瞬态电流抑制，以及改善降噪效果，工艺优化至关重要。克里斯托弗-佩尔托及其同事现在报告了一种包含高密度金属-绝缘体-金属去耦电容器的无源硅插层。研究人员--他们来自英特尔公司--展示了一种使用直径为 18 微米、最小间距为 36 微米的硅插层凸块与顶部芯片连接的硅插层。集成基于高κ氧化物和氮化钛（TiN）电极的电容器可实现片上电压调节、降低压降、抑制噪声并改善所有系统组件的功率传输。利用英特尔的 2.5D Foveros 技术进行三维堆叠，Pelto 及其同事能够在多个工艺节点上集成中央处理单元、图形处理单元和片上系统，并实现高可靠性和电源完整性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Intel’s 2.5D Foveros gains a capacitor

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来源期刊

Nature Electronics Engineering-Electrical and Electronic Engineering

CiteScore

47.50

自引率

2.30%

发文量

159

期刊介绍： Nature Electronics is a comprehensive journal that publishes both fundamental and applied research in the field of electronics. It encompasses a wide range of topics, including the study of new phenomena and devices, the design and construction of electronic circuits, and the practical applications of electronics. In addition, the journal explores the commercial and industrial aspects of electronics research. The primary focus of Nature Electronics is on the development of technology and its potential impact on society. The journal incorporates the contributions of scientists, engineers, and industry professionals, offering a platform for their research findings. Moreover, Nature Electronics provides insightful commentary, thorough reviews, and analysis of the key issues that shape the field, as well as the technologies that are reshaping society. Like all journals within the prestigious Nature brand, Nature Electronics upholds the highest standards of quality. It maintains a dedicated team of professional editors and follows a fair and rigorous peer-review process. The journal also ensures impeccable copy-editing and production, enabling swift publication. Additionally, Nature Electronics prides itself on its editorial independence, ensuring unbiased and impartial reporting. In summary, Nature Electronics is a leading journal that publishes cutting-edge research in electronics. With its multidisciplinary approach and commitment to excellence, the journal serves as a valuable resource for scientists, engineers, and industry professionals seeking to stay at the forefront of advancements in the field.