利用 X 射线驻波辅助 XANES 对 Cr2O3/Cr 双层结构中的 Cr 进行深度依赖性化学态分析

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-07-18 DOI:10.1002/sia.7342

Ayushi Trivedi, Md. Akhlak Alam, Ajay Khooha, Rajnish Dhawan, Rajendra Kumar Sharma, Shilpa Tripathi, Manoj Kumar Tiwari

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引用次数: 0

摘要

我们报告了沉积在硅˂100˃基底上的 Cr2O3/Cr 双层结构的详细深度依赖性结构和化学分析。为此，我们采用了非破坏性的 X 射线反射率和掠入射 X 射线荧光同步测量法。利用 X 射线驻波（XSW）辅助 X 射线吸收近边缘结构（XANES）测量，研究了铬原子化学状态随深度的相应变化。利用 X 射线光电子能谱 (XPS) 测定了 Cr2O3/Cr 双层结构中存在的铬原子的各种氧化态。深度分辨 XANES 测量证实，在 Cr2O3/Cr 双层结构的顶层表面存在氧化铬 (Cr2O3) 和氢氧化物 (Cr (OH)3)。结果还显示，在界面介质中存在金属铬及其化合物 Cr2O3 和 Cr (OH)3，表明 Cr2O3 层和 Cr 层之间存在显著的混合。我们的研究结果清楚地表明，XSW 辅助 XANES 技术对于确定薄膜结构表面、界面和不同深度的化学状态变化极为有效。此类分析尤其有助于区分金属与其自身氧化物的存在，即使在薄膜介质的更深处也是如此。

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X‐ray standing wave assisted XANES for depth dependent chemical state analysis of Cr in Cr2O3/Cr bilayer structure

We report the detailed depth‐dependent structural and chemical analysis of the Cr2O3/Cr bilayer structure deposited on Si ˂100˃ substrate. The non‐destructive simultaneous X‐ray reflectivity and grazing incidence X‐ray fluorescence measurements were used for this purpose. Corresponding variation in the chemical state of Cr atoms as a function of depth has been studied using X‐ray standing wave (XSW) assisted X‐ray absorption near edge structure (XANES) measurements. Various oxidation states of Cr atoms present in the Cr2O3/Cr bilayer structure were determined using X‐ray photoelectron spectroscopy (XPS). Depth‐resolved XANES measurements confirmed the presence of chromium oxide (Cr2O3) and hydroxide (Cr (OH)3) at the top surface of the Cr2O3/Cr bilayer structure. The results also reveal the presence of metallic Cr along with its compounds Cr2O3 and Cr (OH)3 at the interface medium, showing significant mixing between the Cr2O3 and Cr layers. Our results clearly demonstrate that the XSW assisted XANES technique is extremely efficient for determining the variation of chemical states at the surface, interface, and different depths of a thin film structure. Such types of analysis are particularly useful for differentiating the presence of a metal from its own oxides, even at higher depths inside a thin film medium.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.