Jie Luo;Yanyu Yang;Gangping Yan;Chuqiao Niu;Yunjiao Bao;Yupeng Lu;Zhengying Jiao;Jinjuan Xiang;Guilei Wang;Gaobo Xu;Huaxiang Yin;Chao Zhao;Jun Luo
{"title":"InGaZnO 和 InSnO 薄膜晶体管的耐久性和可靠性机理研究","authors":"Jie Luo;Yanyu Yang;Gangping Yan;Chuqiao Niu;Yunjiao Bao;Yupeng Lu;Zhengying Jiao;Jinjuan Xiang;Guilei Wang;Gaobo Xu;Huaxiang Yin;Chao Zhao;Jun Luo","doi":"10.1109/JEDS.2024.3431289","DOIUrl":null,"url":null,"abstract":"Amorphous oxide semiconductor-thin film transistors (AOS-TFTs) have attracted considerable attention due to their impressive performance in various applications. However, there is a limited amount of study available on the reliability of AOS-TFTs. This work investigates the endurance and reliability mechanisms of Indium Gallium Zinc Oxide (IGZO) and Indium Tin Oxide (ITO) TFTs. The devices underwent a range of test conditions to evaluate their endurance properties. The study utilized Zero-Bias Endurance Tests (ZBET) to examine the fluctuating behaviors of threshold voltage, revealing valuable insights into the causes of electrical instability. The study highlights the crucial importance of electron depletion and restoration dynamics in affecting the reliability of TFTs. Additionally, the study found differences in the performance of IGZO-TFTs and ITO-TFTs, suggesting that the differing features of the materials have a significant impact on the endurance and reliability of TFTs.","PeriodicalId":2,"journal":{"name":"ACS Applied Bio Materials","volume":null,"pages":null},"PeriodicalIF":4.6000,"publicationDate":"2024-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10604821","citationCount":"0","resultStr":"{\"title\":\"The Endurance and Reliability Mechanisms Investigation of InGaZnO and InSnO Thin Film Transistors\",\"authors\":\"Jie Luo;Yanyu Yang;Gangping Yan;Chuqiao Niu;Yunjiao Bao;Yupeng Lu;Zhengying Jiao;Jinjuan Xiang;Guilei Wang;Gaobo Xu;Huaxiang Yin;Chao Zhao;Jun Luo\",\"doi\":\"10.1109/JEDS.2024.3431289\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Amorphous oxide semiconductor-thin film transistors (AOS-TFTs) have attracted considerable attention due to their impressive performance in various applications. However, there is a limited amount of study available on the reliability of AOS-TFTs. This work investigates the endurance and reliability mechanisms of Indium Gallium Zinc Oxide (IGZO) and Indium Tin Oxide (ITO) TFTs. The devices underwent a range of test conditions to evaluate their endurance properties. The study utilized Zero-Bias Endurance Tests (ZBET) to examine the fluctuating behaviors of threshold voltage, revealing valuable insights into the causes of electrical instability. The study highlights the crucial importance of electron depletion and restoration dynamics in affecting the reliability of TFTs. Additionally, the study found differences in the performance of IGZO-TFTs and ITO-TFTs, suggesting that the differing features of the materials have a significant impact on the endurance and reliability of TFTs.\",\"PeriodicalId\":2,\"journal\":{\"name\":\"ACS Applied Bio Materials\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.6000,\"publicationDate\":\"2024-07-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10604821\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ACS Applied Bio Materials\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/10604821/\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, BIOMATERIALS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ACS Applied Bio Materials","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10604821/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, BIOMATERIALS","Score":null,"Total":0}
The Endurance and Reliability Mechanisms Investigation of InGaZnO and InSnO Thin Film Transistors
Amorphous oxide semiconductor-thin film transistors (AOS-TFTs) have attracted considerable attention due to their impressive performance in various applications. However, there is a limited amount of study available on the reliability of AOS-TFTs. This work investigates the endurance and reliability mechanisms of Indium Gallium Zinc Oxide (IGZO) and Indium Tin Oxide (ITO) TFTs. The devices underwent a range of test conditions to evaluate their endurance properties. The study utilized Zero-Bias Endurance Tests (ZBET) to examine the fluctuating behaviors of threshold voltage, revealing valuable insights into the causes of electrical instability. The study highlights the crucial importance of electron depletion and restoration dynamics in affecting the reliability of TFTs. Additionally, the study found differences in the performance of IGZO-TFTs and ITO-TFTs, suggesting that the differing features of the materials have a significant impact on the endurance and reliability of TFTs.