Tasuku Hayashi, Rikuta Miyagawa, Yuta Yagi, Keita Tanaka, Ryo Ota, Noriko Y. Yamasaki, Kazuhisa Mitsuda, Keisuke Maehata, Toru Hara
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引用次数: 0
摘要
天体材料研究为了解太阳系的形成和演化提供了宝贵的资料。要在亚微米尺度上分析这类天体材料,最有用的工具之一是结合扫描透射电子显微镜(STEM)的能量色散 X 射线光谱仪(EDS)。传统的基于半导体的 EDS 系统有时不足以分辨能量相近的发射线。过渡边缘传感器(TES)X 射线微量热仪是克服这一问题的一个很有前途的解决方案。我们开发了一个 64 像素 TES X 射线微量热仪阵列,在从 B Kα 到 Cu Kα 的能带上具有约 7 eV (FWHM) 的能量分辨率。然而,计数率仅为大约 1000 次/秒/阵列。探测器和样品之间的距离为 30 厘米,这受到冰箱舞台的限制。因此,我们使用了 X 射线聚毛细管来聚焦 X 射线,其聚焦尺寸为直径 5 毫米,导致探测效率仅为 5%。为了增加有效面积,我们开发了一种具有大型阵列的大尺寸吸收器。我们创建了一个三维结构来填补 TES 像素之间的死角。此外,我们还制作了一个由 224 个元件组成的阵列,将检测效率提高了 10 倍。本文将详细介绍悬挂式吸收器的设计、制造工艺和器件性能。
Design and Development of a 224-pixel TES X-Ray Microcalorimeter System for Microanalysis with STEM
Studies of astromaterials provide valuable insights into the formation and evolution of the solar system. To analyze such astromaterials on a sub-micrometer scale, one of the most useful tools is energy-dispersive X-ray spectroscopy (EDS) in conjunction with scanning transmission electron microscope (STEM). The conventional semiconductor-based EDS system is sometimes insufficient to resolve emission lines at closely adjacent energies. A transition edge sensor (TES) X-ray microcalorimeter is a promising solution to overcome this problem. We developed a 64-pixel TES X-ray microcalorimeter array which had an energy resolution of approximately 7 eV (FWHM) at an energy band from B Kα to Cu Kα. However, the counting rate was only approximately 1000 count/s/array. The distance between the detector and the sample is 30 cm, limited by the stage of the refrigerator. Therefore, an X-ray polycapillary is used to focus the X-ray, which focus size is 5 mm in diameter, resulting in a detection efficiency of only 5%. To increase the effective area, we developed a large size absorber with a large-scale array. A three-dimensional structure was created to fill the dead space between TES pixels. Additionally, an array of 224 elements was made to increase the detection efficiency by a factor of 10. In this paper, we provide more details of design, fabrication process of the overhang absorber, and device performance.
期刊介绍:
The Journal of Low Temperature Physics publishes original papers and review articles on all areas of low temperature physics and cryogenics, including theoretical and experimental contributions. Subject areas include: Quantum solids, liquids and gases; Superfluidity; Superconductivity; Condensed matter physics; Experimental techniques; The Journal encourages the submission of Rapid Communications and Special Issues.