利用工业 CMOS 制造低电荷噪声量子点

IF 6.6 1区 物理与天体物理 Q1 PHYSICS, APPLIED
A. Elsayed, M. M. K. Shehata, C. Godfrin, S. Kubicek, S. Massar, Y. Canvel, J. Jussot, G. Simion, M. Mongillo, D. Wan, B. Govoreanu, I. P. Radu, R. Li, P. Van Dorpe, K. De Greve
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引用次数: 0

摘要

硅自旋量子比特因其相干性和与 CMOS 技术的兼容性,有望成为可扩展量子计算机的候选器件。先进的工业工艺可确保晶圆尺度的一致性和高器件产量,但传统的晶体管工艺无法直接应用于量子比特结构。为了充分利用微电子行业的专业知识,我们为硅 MOS 量子位集成定制了一条 300 毫米晶圆制造线。通过对栅极堆栈的精心优化,我们报告了在 mK 温度下硅/二氧化硅界面上量子点的均匀运行情况。我们测量到了创纪录的低平均噪声,1 Hz 时的噪声值为 0.61 \({\rm{mu}}{rm{eVH}}{\rm{z}}^{-0.5}\),在某些工作条件下甚至低于 0.1 \({\rm{mu}}{rm{eVH}}{\rm{z}}^{-0.5}\)。电荷噪声测量的统计分析表明,噪声源可以用两级波动器模型来描述。这种可再现的低噪声水平,结合我们量子点的均匀运行,标志着CMOS制造的自旋量子比特已成为实现可扩展高保真量子比特的成熟平台。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Low charge noise quantum dots with industrial CMOS manufacturing

Low charge noise quantum dots with industrial CMOS manufacturing

Silicon spin qubits are promising candidates for scalable quantum computers, due to their coherence and compatibility with CMOS technology. Advanced industrial processes ensure wafer-scale uniformity and high device yield, but traditional transistor processes cannot be directly transferred to qubit structures. To leverage the micro-electronics industry expertise, we customize a 300 mm wafer fabrication line for silicon MOS qubit integration. With careful optimization of the gate stack, we report uniform quantum dot operation at the Si/SiO2 interface at mK temperature. We measure a record-low average noise with a value of 0.61 \({\rm{\mu }}{\rm{eVH}}{{\rm{z}}}^{-0.5}\) at 1 Hz and even below 0.1 \({\rm{\mu }}{\rm{eVH}}{{\rm{z}}}^{-0.5}\) for some operating conditions. Statistical analysis of the charge noise measurements show that the noise source can be described by a two-level fluctuator model. This reproducible low noise level, in combination with uniform operation of our quantum dots, marks CMOS manufactured spin qubits as a mature platform towards scalable high-fidelity qubits.

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来源期刊
npj Quantum Information
npj Quantum Information Computer Science-Computer Science (miscellaneous)
CiteScore
13.70
自引率
3.90%
发文量
130
审稿时长
29 weeks
期刊介绍: The scope of npj Quantum Information spans across all relevant disciplines, fields, approaches and levels and so considers outstanding work ranging from fundamental research to applications and technologies.
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