通过实验确定离子-固体相互作用势及其对植入粒子轮廓的影响

IF 0.5 Q4 PHYSICS, CONDENSED MATTER

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques Pub Date : 2024-07-15 DOI:10.1134/S1027451024700265

A. N. Zinoviev, P. Yu. Babenko, V. S. Mikhailov, D. S. Tensin

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引用次数: 0

摘要

摘要根据对穿过金薄膜的粒子角度分布的分析，获得了最能描述实验的电势参数。所得到的电势与描述气相碰撞的电势不同，屏蔽常数有明显变化。分析了碰撞能量、电势选择和电子停止力模型对植入粒子深度分布的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Determination of the Ion–Solid Interaction Potential from Experiment and Its Effect on the Profiles of Implanted Particles

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Determination of the Ion–Solid Interaction Potential from Experiment and Its Effect on the Profiles of Implanted Particles

Based on analysis of the angular distributions of particles passing through thin gold films, the parameters of a potential that best describe the experiment are obtained. The resulting potential differs from the potential describing collisions in the gas phase by a noticeable change in the screening constant. The effect of the collision energy, selection of the potential, and the model of the electronic stopping power on the depth distribution of implanted particles is analyzed.

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来源期刊

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques PHYSICS, CONDENSED MATTER-

CiteScore

0.90

自引率

25.00%

发文量

144

审稿时长

3-8 weeks

期刊介绍： Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques publishes original articles on the topical problems of solid-state physics, materials science, experimental techniques, condensed media, nanostructures, surfaces of thin films, and phase boundaries: geometric and energetical structures of surfaces, the methods of computer simulations; physical and chemical properties and their changes upon radiation and other treatments; the methods of studies of films and surface layers of crystals (XRD, XPS, synchrotron radiation, neutron and electron diffraction, electron microscopic, scanning tunneling microscopic, atomic force microscopic studies, and other methods that provide data on the surfaces and thin films). Articles related to the methods and technics of structure studies are the focus of the journal. The journal accepts manuscripts of regular articles and reviews in English or Russian language from authors of all countries. All manuscripts are peer-reviewed.