基于光电检测的可变厚度多层材料的选择性清除

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology Pub Date : 2024-07-17 DOI:10.1016/j.precisioneng.2024.07.008

Yingbo Feng , Hengfeng Yang , Hong Shen , Jing Zhou

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引用次数: 0

摘要

提出了一种具有近轴单色光电检测功能的超快激光加工系统，用于选择性去除厚度可变的多层材料。建立了信号演变与厚度可变银层烧蚀进度之间的相关性，并确定了信号衰减阈值以确保基底不被去除，为高能量和低能量相结合的加工策略提供了标准。实验验证了所提出的策略，它兼顾了低能量去除的质量和高能量去除的效率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Selective removal of variable thickness multilayer materials based on photoelectric detection

An ultrafast laser processing system with near-axis monochromatic photoelectric detection for selective removal of variable thickness multilayer materials is proposed. The correlation between signal evolution and ablation progress of silver layer with the variable thickness is established, and a signal attenuation threshold is determined to ensure non-removal of the substrate, providing criteria for the processing strategy combining high and low energies. The proposed strategy is experimentally validated, which balances the quality of low-energy removal and the efficiency of high-energy removal.

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来源期刊

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology 工程技术-工程：制造

CiteScore

7.40

自引率

5.60%

发文量

177

审稿时长

46 days

期刊介绍： Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.