用离子发光法测定 α-SiO2 中缺陷的通量演化

IF 1.4 3区 物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION
E. Szilágyi , M.K. Pal , E. Kótai , Z. Zolnai , I. Bányász
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引用次数: 0

摘要

发光是分析各种材料中各类缺陷的有力工具;二氧化硅是一种广泛应用于光子学、微电子学、核能工业、光电子学和其他重要技术应用领域的材料,它经常被用于分析二氧化硅的缺陷。在这项工作中,采用离子发光(IL)方法对单晶 (0001) α-二氧化硅(石英)样品进行了研究。在这种情况下,当 2 MeV He+ 光束到达石英样品时,可以观察到强烈的发射光。在 1.45 eV、1.76 eV 和 2.34 eV 处发现了三个发射带,相应的缺陷分别被确定为未知来源、非桥接氧空穴中心 (NBOHC) 和自俘获激子 (STE)。缺陷相关 IL 峰的演变是 He+ 辐照通量的函数。为了进行准确的数据评估,确定并考虑了应用 IL 设置(准直器、光纤和光谱仪)的仪器功能。此外,还讨论了 IL 测量方法问题(包括设置、样品支架和正确的光束设置)的重要性。所述的系统校准和数据评估步骤对于离子束辐照光谱分析是不可或缺的,可帮助详细了解离子束辐照过程中发生的缺陷演变。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fluence evolution of defects in α-SiO2 determined by ionoluminescence

Luminescence is a powerful tool to analyse various types of defects in a wide range of materials; it is often applied for silica, which is a broadly used material in photonics, microelectronics, nuclear energy industry, optoelectronics and other important technological applications. In this work, a single crystalline (0001) α-SiO2 (quartz) sample has been investigated by the ionoluminescence (IL) method. In this case, intense emitted light can be observed when a 2 MeV He+ beam reaches the quartz sample. Three emission bands were found at 1.45 eV, 1.76 eV and 2.34 eV, the corresponding defects were identified as an unknown origin, non-bridging oxygen hole centres (NBOHC), and self-trapped excitons (STEs), respectively. The evolution of the defect-related IL peaks was determined as a function of He+ irradiation fluence. To perform accurate data evaluation, the instrumental function of the applied IL set-up (collimator, optical fibers and spectrometer) was determined and taken into account. The importance of methodological issues in the IL measurement (including set-up, sample holder and proper beam settings) was also discussed. The described steps of system calibration and data evaluation are indispensable for IL spectrum analysis leading to a detailed understanding of defect evolution taking place during the ion-beam irradiation process.

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来源期刊
CiteScore
2.80
自引率
7.70%
发文量
231
审稿时长
1.9 months
期刊介绍: Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.
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