纳米级真空沟道晶体管综述:从制造到电气性能

IF 2.6 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
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引用次数: 0

摘要

与传统的场效应晶体管相比,真空沟道晶体管具有引人入胜的特性,因此已成为下一代技术的理想候选器件。纳米级真空沟道晶体管具有类似真空的弹道传输、对辐射不敏感和纳米级尺寸等优势。与场发射器件不同,纳米级真空沟道晶体管可以在所需温度下诱导电子发射;为了增加场发射,需要在阴极上安装尖锐而薄的发射器。本文全面概述了近期的研究进展。文章首先简要介绍了真空晶体管及其纳米级微型化。然后,讨论了具有真空间隙的不同结构的最新进展,包括其物理性质、制造方法和器件应用。最后,本综述总结了这一新兴领域的一些挑战和前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A synoptic review of nanoscale vacuum channel transistor: Fabrication to electrical performance

The vacuum channel transistor has emerged as a promising candidate for next-generation technology due to its intriguing features compared to the conventional field effect transistor. Nanoscale vacuum channel transistors have a particular advantage due to the promise of vacuum-like ballistic transport, radiation insensitivity, and nanoscale dimensions. Unlike field emission devices, nanoscale vacuum channel transistors can induce electron emission at a desired temperature; sharp and thin emitters on the cathode are desired to increase field emission. This article provides a comprehensive overview of recent research advancements. It begins with a brief introduction to vacuum transistors and their miniaturization to the nanoscale. Then, recent advancements in different architectures with vacuum gaps, including their physical properties, fabrication methods, and device applications, are discussed. Finally, this review concludes by highlighting some challenges and perspectives in this emerging field.

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来源期刊
Microelectronic Engineering
Microelectronic Engineering 工程技术-工程:电子与电气
CiteScore
5.30
自引率
4.30%
发文量
131
审稿时长
29 days
期刊介绍: Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.
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