{"title":"在聚(对苯二甲酸乙二醇酯)上制造抗反射纳米结构的高效环保方法","authors":"Hongkun Zhou, Lan Mu, Ruibin Liang, Linfeng Lan","doi":"10.1002/jsid.1336","DOIUrl":null,"url":null,"abstract":"<p>Antireflection surfaces are widely used in optical devices (such as vehicle display, solar cells, and architectural glass) to reduce the reflection and increase transmittance. Plasma etching shows great potential in making subwavelength antireflection structures for its advantage of scalable, low-cost, and applicable in flexible substrates. Here, we demonstrate an antireflection nanostructure by O<sub>2</sub> plasma etching on poly (ethylene terephthalate) (PET) substrate without additional corrosive gas species or antireflective coatings. Nanopores on the surface were formed due to the different etching rates of the organic region and silica region of the surface. The solar weighted average transmittance was improved from 91.6% to 94.8% for single-side treated PET with silica antiblocking layer. The transmission increment was attributed to the gradient refractive index of the nanostructured surface due to the elimination of step discontinuity in refractive index. The result shows a highly efficient, eco-friendly, solvent-free, economical, and sputtering target-free method for reducing the reflection and increasing the transmittance of the substrates.</p>","PeriodicalId":49979,"journal":{"name":"Journal of the Society for Information Display","volume":"32 7","pages":"530-536"},"PeriodicalIF":1.7000,"publicationDate":"2024-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A highly efficient, eco-friendly method for antireflection nanostructures on poly (ethylene terephthalate)\",\"authors\":\"Hongkun Zhou, Lan Mu, Ruibin Liang, Linfeng Lan\",\"doi\":\"10.1002/jsid.1336\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p>Antireflection surfaces are widely used in optical devices (such as vehicle display, solar cells, and architectural glass) to reduce the reflection and increase transmittance. Plasma etching shows great potential in making subwavelength antireflection structures for its advantage of scalable, low-cost, and applicable in flexible substrates. Here, we demonstrate an antireflection nanostructure by O<sub>2</sub> plasma etching on poly (ethylene terephthalate) (PET) substrate without additional corrosive gas species or antireflective coatings. Nanopores on the surface were formed due to the different etching rates of the organic region and silica region of the surface. The solar weighted average transmittance was improved from 91.6% to 94.8% for single-side treated PET with silica antiblocking layer. The transmission increment was attributed to the gradient refractive index of the nanostructured surface due to the elimination of step discontinuity in refractive index. The result shows a highly efficient, eco-friendly, solvent-free, economical, and sputtering target-free method for reducing the reflection and increasing the transmittance of the substrates.</p>\",\"PeriodicalId\":49979,\"journal\":{\"name\":\"Journal of the Society for Information Display\",\"volume\":\"32 7\",\"pages\":\"530-536\"},\"PeriodicalIF\":1.7000,\"publicationDate\":\"2024-06-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the Society for Information Display\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://onlinelibrary.wiley.com/doi/10.1002/jsid.1336\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Society for Information Display","FirstCategoryId":"5","ListUrlMain":"https://onlinelibrary.wiley.com/doi/10.1002/jsid.1336","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
摘要
抗反射表面被广泛应用于光学设备(如汽车显示屏、太阳能电池和建筑玻璃)中,以减少反射和增加透射率。等离子刻蚀具有可扩展、成本低、适用于柔性基底等优点,在制作亚波长抗反射结构方面显示出巨大潜力。在这里,我们展示了在聚(对苯二甲酸乙二醇酯)(PET)基底上通过 O2 等离子刻蚀技术制作的抗反射纳米结构,无需额外的腐蚀性气体或抗反射涂层。由于表面有机区和二氧化硅区的蚀刻速率不同,表面形成了纳米孔。经过单面处理并带有二氧化硅抗阻挡层的 PET 的太阳加权平均透射率从 91.6% 提高到 94.8%。透射率提高的原因是纳米结构表面的梯度折射率消除了折射率的阶跃不连续性。结果表明,这是一种高效、环保、无溶剂、经济、无溅射靶材的方法,可减少基底的反射并提高透射率。
A highly efficient, eco-friendly method for antireflection nanostructures on poly (ethylene terephthalate)
Antireflection surfaces are widely used in optical devices (such as vehicle display, solar cells, and architectural glass) to reduce the reflection and increase transmittance. Plasma etching shows great potential in making subwavelength antireflection structures for its advantage of scalable, low-cost, and applicable in flexible substrates. Here, we demonstrate an antireflection nanostructure by O2 plasma etching on poly (ethylene terephthalate) (PET) substrate without additional corrosive gas species or antireflective coatings. Nanopores on the surface were formed due to the different etching rates of the organic region and silica region of the surface. The solar weighted average transmittance was improved from 91.6% to 94.8% for single-side treated PET with silica antiblocking layer. The transmission increment was attributed to the gradient refractive index of the nanostructured surface due to the elimination of step discontinuity in refractive index. The result shows a highly efficient, eco-friendly, solvent-free, economical, and sputtering target-free method for reducing the reflection and increasing the transmittance of the substrates.
期刊介绍:
The Journal of the Society for Information Display publishes original works dealing with the theory and practice of information display. Coverage includes materials, devices and systems; the underlying chemistry, physics, physiology and psychology; measurement techniques, manufacturing technologies; and all aspects of the interaction between equipment and its users. Review articles are also published in all of these areas. Occasional special issues or sections consist of collections of papers on specific topical areas or collections of full length papers based in part on oral or poster presentations given at SID sponsored conferences.