Markus Blothe, Alessandro Alberucci, Namig Alasgarzade, Maxime Chambonneau, Stefan Nolte
{"title":"利用皮秒激光脉冲横向刻蚀硅波导","authors":"Markus Blothe, Alessandro Alberucci, Namig Alasgarzade, Maxime Chambonneau, Stefan Nolte","doi":"10.1002/lpor.202400535","DOIUrl":null,"url":null,"abstract":"In this work, picosecond laser inscription of segmented waveguides in crystalline silicon based on a deterministic single‐pulse modification process is demonstrated. Pulses of 43 ps duration at 1.55 wavelength are used to transversely inscribe periodic structures with a pulse‐to‐pulse pitch of ≈2 . Infrared shadowgraphy images and Raman spectroscopy measurements indicate that the modifications exhibit a spherical shape. Characterization of waveguide performance at 1.55 for various pulse energies and periods is carried out. Direct comparison with numerical simulations confirms the presence of graded index waveguides, encompassing a micrometer core size and a maximum refractive index change of . This short‐pulse inscription approach can pave the way for 3D integrated photonic devices in the bulk of silicon.","PeriodicalId":204,"journal":{"name":"Laser & Photonics Reviews","volume":null,"pages":null},"PeriodicalIF":9.8000,"publicationDate":"2024-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Transverse Inscription of Silicon Waveguides by Picosecond Laser Pulses\",\"authors\":\"Markus Blothe, Alessandro Alberucci, Namig Alasgarzade, Maxime Chambonneau, Stefan Nolte\",\"doi\":\"10.1002/lpor.202400535\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, picosecond laser inscription of segmented waveguides in crystalline silicon based on a deterministic single‐pulse modification process is demonstrated. Pulses of 43 ps duration at 1.55 wavelength are used to transversely inscribe periodic structures with a pulse‐to‐pulse pitch of ≈2 . Infrared shadowgraphy images and Raman spectroscopy measurements indicate that the modifications exhibit a spherical shape. Characterization of waveguide performance at 1.55 for various pulse energies and periods is carried out. Direct comparison with numerical simulations confirms the presence of graded index waveguides, encompassing a micrometer core size and a maximum refractive index change of . This short‐pulse inscription approach can pave the way for 3D integrated photonic devices in the bulk of silicon.\",\"PeriodicalId\":204,\"journal\":{\"name\":\"Laser & Photonics Reviews\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":9.8000,\"publicationDate\":\"2024-07-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser & Photonics Reviews\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1002/lpor.202400535\",\"RegionNum\":1,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser & Photonics Reviews","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1002/lpor.202400535","RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
Transverse Inscription of Silicon Waveguides by Picosecond Laser Pulses
In this work, picosecond laser inscription of segmented waveguides in crystalline silicon based on a deterministic single‐pulse modification process is demonstrated. Pulses of 43 ps duration at 1.55 wavelength are used to transversely inscribe periodic structures with a pulse‐to‐pulse pitch of ≈2 . Infrared shadowgraphy images and Raman spectroscopy measurements indicate that the modifications exhibit a spherical shape. Characterization of waveguide performance at 1.55 for various pulse energies and periods is carried out. Direct comparison with numerical simulations confirms the presence of graded index waveguides, encompassing a micrometer core size and a maximum refractive index change of . This short‐pulse inscription approach can pave the way for 3D integrated photonic devices in the bulk of silicon.
期刊介绍:
Laser & Photonics Reviews is a reputable journal that publishes high-quality Reviews, original Research Articles, and Perspectives in the field of photonics and optics. It covers both theoretical and experimental aspects, including recent groundbreaking research, specific advancements, and innovative applications.
As evidence of its impact and recognition, Laser & Photonics Reviews boasts a remarkable 2022 Impact Factor of 11.0, according to the Journal Citation Reports from Clarivate Analytics (2023). Moreover, it holds impressive rankings in the InCites Journal Citation Reports: in 2021, it was ranked 6th out of 101 in the field of Optics, 15th out of 161 in Applied Physics, and 12th out of 69 in Condensed Matter Physics.
The journal uses the ISSN numbers 1863-8880 for print and 1863-8899 for online publications.