基于催化钌门控场效应晶体管的高性能氨气传感器

IF 5.3 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

ACS Applied Nano Materials Pub Date : 2024-07-05 DOI:10.1021/acsanm.4c02392

Xinxin He, Ping Guo, Xuanyu Ren, Xuyang An, Yuan Li, Shuai Liang, Zhenlong Wang, Jia Zhang

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引用次数: 0

摘要

钌（Ru）在合成和分解氨（NH3）过程中的催化性能引起了广泛的关注和研究。考虑到钌对 NH3 的选择性吸附和优异的催化效果，它在氨检测领域具有巨大的潜力。在这项研究中，我们提出了一种高性能 NH3 传感器，该传感器基于一个利用纳米 Ru 颗粒作为敏感栅极的催化金属栅极场效应晶体管（FET）（Ru-FET）。该传感器在室温下对 1 ppm 的 NH3 具有 11.3% 的高响应，快速响应和恢复过程分别为 8 秒和 85 秒。同时，该传感器的检测范围为 0.4-20 ppm，具有良好的重复性和选择性。Ru-FET 传感器的优异性能表明，将敏感材料和传感器结构明智地结合在一起，可以制造出在室温下工作的高性能 NH3 传感器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

High-Performance Ammonia Gas Sensor Based on a Catalytic Ruthenium- Gated Field-Effect Transistor

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High-Performance Ammonia Gas Sensor Based on a Catalytic Ruthenium- Gated Field-Effect Transistor

The catalytic performance of ruthenium (Ru) in the synthesis and decomposition of ammonia (NH₃) has attracted extensive attention and research. Considering its selective adsorption and excellent catalytic effect toward NH₃, it holds significant potential in the field of ammonia detection. In this study, we present a high-performance NH₃ sensor that was based on a catalytic metal gate field-effect transistor (FET) utilizing Ru nanoparticles as the sensitive gate (Ru-FET). The sensor exhibits a high response of 11.3% to 1 ppm of NH₃ at room temperature, with quick response and recovery processes of 8 and 85 s, respectively. Meanwhile, the sensor possesses a detection range of 0.4–20 ppm along with good repeatability and selectivity. The exceptional performance of the Ru-FET sensor suggests the potential of judiciously combining sensitive materials and sensor structures to manufacture high-performance NH₃ sensors operating at room temperature.

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来源期刊

ACS Applied Nano Materials Multiple-

CiteScore

8.30

自引率

3.40%

发文量

1601

期刊介绍： ACS Applied Nano Materials is an interdisciplinary journal publishing original research covering all aspects of engineering, chemistry, physics and biology relevant to applications of nanomaterials. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials, engineering, physics, bioscience, and chemistry into important applications of nanomaterials.