金沉积速率对 Si(111) 和 Si(011) 表面金液滴速度的影响(蒙特卡罗模拟)

IF 1.5 4区 物理与天体物理 Q3 PHYSICS, CONDENSED MATTER
Snezhana Mantsurova, Nataliya Shwartz
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引用次数: 0

摘要

本文对金沉积过程中金液滴在硅(111)和硅(011)表面上的运动进行了蒙特卡罗模拟。分析了金沉积速率 F 对硅(111)和硅(011)表面上金-硅液滴速度的影响。在临近的 (111) 表面上,液滴以几乎恒定的速度移动,而在 (011) 表面上,液滴速度随着金沉积速率的增加而降低。研究表明,液滴速度与金沉积速率的关系是由液滴尺寸变化决定的。不同取向基底的蚀刻各向异性导致硅(111)和硅(011)表面液滴下的蚀刻坑形状不同。这导致液滴速度的差异取决于 (111) 和 (011) 表面的金沉积速率。硅(011)表面上液滴运动的特点得到了证实:由于液滴可能向两个相反的方向运动,因此液滴能够合并。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Au Deposition Rate on the Gold Droplet Velocity on Si(111) and Si(011) Surfaces (Monte Carlo Simulation)
Herein, Monte Carlo simulation of gold droplets motion on Si(111) and Si(011) surfaces during the gold deposition is carried out. The influence of gold deposition rate F on the Au–Si droplet velocity on the silicon surfaces with (111) and (011) orientations is analyzed. On the vicinal (111) surface, the droplet moves with almost constant velocity, while, on the (011) surface, the droplet velocity decreases as the Au deposition rate increases. It is demonstrated that the droplet velocity dependence on the gold deposition rate is determined by the droplet size change. The etching anisotropy of substrates with different orientations leads to different shapes of an etch pit under the droplet on Si(111) and Si(011) surfaces. This results in differences in the droplet velocity depending on the gold deposition rate on (111) and (011) surfaces. The feature of the droplet motion on the Si(011) surface is demonstrated: the droplets are able to merge due to the possibility of motion in two opposite directions.
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来源期刊
Physica Status Solidi B-basic Solid State Physics
Physica Status Solidi B-basic Solid State Physics 物理-物理:凝聚态物理
CiteScore
3.30
自引率
6.20%
发文量
321
审稿时长
2 months
期刊介绍: physica status solidi is devoted to the thorough peer review and the rapid publication of new and important results in all fields of solid state and materials physics, from basic science to applications and devices. Being among the largest and most important international publications, the pss journals publish review articles, letters and original work as well as special issues and conference contributions. physica status solidi b – basic solid state physics is devoted to topics such as theoretical and experimental investigations of the atomistic and electronic structure of solids in general, phase transitions, electronic and optical properties of low-dimensional, nano-scale, strongly correlated, or disordered systems, superconductivity, magnetism, ferroelectricity etc.
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