Guodong Nian , Yu-Sheng Lin , Jia-Ming Yang , Sammy Hassan , Jyun-Lin Wu , Sherwin Tang , Jun He , Joost J. Vlassak , Zhigang Suo
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Initiation and arrest of cracks from corners in multi-chip semiconductor devices
A contemporary semiconductor device often contains multiple chips. Corners of the chips concentrate stress, and are principal sites to initiate failure. Here we propose to characterize the corners using a double cantilever beam, in which two silicon beams sandwich a row of chips. As the two beams are pulled open, a crack initiates at the corner of a chip, and runs unstably on the interface between the chip and a beam. The crack may or may not arrest, depending on various experimental conditions. We calculate energy release rate as a function of crack length by using a combination of finite element method and an analytical solution of the singular field around a corner. At a fixed applied displacement, the energy release rate is low for a short crack, peaks for a crack of intermediate length, and drops for a long crack. This non-monotonic behavior explains how a crack initiates, grows unstably, and possibly arrests. If the crack does arrest, as the two beams open further, the crack grows stably. We relate the initiation and arrest of the crack to machine compliance, specimen geometry, and flaw size. The force at which the crack initiates can be used to characterize the manufacturing process, whereas the stable growth of the crack can be used to measure interfacial toughness. It is hoped that this work will aid the development of multi-chip semiconductor devices.
期刊介绍:
The aim of Journal of The Mechanics and Physics of Solids is to publish research of the highest quality and of lasting significance on the mechanics of solids. The scope is broad, from fundamental concepts in mechanics to the analysis of novel phenomena and applications. Solids are interpreted broadly to include both hard and soft materials as well as natural and synthetic structures. The approach can be theoretical, experimental or computational.This research activity sits within engineering science and the allied areas of applied mathematics, materials science, bio-mechanics, applied physics, and geophysics.
The Journal was founded in 1952 by Rodney Hill, who was its Editor-in-Chief until 1968. The topics of interest to the Journal evolve with developments in the subject but its basic ethos remains the same: to publish research of the highest quality relating to the mechanics of solids. Thus, emphasis is placed on the development of fundamental concepts of mechanics and novel applications of these concepts based on theoretical, experimental or computational approaches, drawing upon the various branches of engineering science and the allied areas within applied mathematics, materials science, structural engineering, applied physics, and geophysics.
The main purpose of the Journal is to foster scientific understanding of the processes of deformation and mechanical failure of all solid materials, both technological and natural, and the connections between these processes and their underlying physical mechanisms. In this sense, the content of the Journal should reflect the current state of the discipline in analysis, experimental observation, and numerical simulation. In the interest of achieving this goal, authors are encouraged to consider the significance of their contributions for the field of mechanics and the implications of their results, in addition to describing the details of their work.