利用柔性聚合物转移法实现铋基层状氧化物薄膜的大面积转移

IF 11.1 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
James P. Barnard, Jianan Shen, Benson Kunhung Tsai, Yizhi Zhang, Max R. Chhabra, Ke Xu, Xinghang Zhang, Raktim Sarma, Aleem Siddiqui, Haiyan Wang
{"title":"利用柔性聚合物转移法实现铋基层状氧化物薄膜的大面积转移","authors":"James P. Barnard, Jianan Shen, Benson Kunhung Tsai, Yizhi Zhang, Max R. Chhabra, Ke Xu, Xinghang Zhang, Raktim Sarma, Aleem Siddiqui, Haiyan Wang","doi":"10.1002/smsc.202400114","DOIUrl":null,"url":null,"abstract":"Magnetic and ferroelectric oxide thin films have long been studied for their applications in electronics, optics, and sensors. The properties of these oxide thin films are highly dependent on the film growth quality and conditions. To maximize the film quality, epitaxial oxide thin films are frequently grown on single-crystal oxide substrates such as strontium titanate (SrTiO<sub>3</sub>) and lanthanum aluminate (LaAlO<sub>3</sub>) to satisfy lattice matching and minimize defect formation. However, these single-crystal oxide substrates cannot readily be used in practical applications due to their high cost, limited availability, and small wafer sizes. One leading solution to this challenge is film transfer. In this demonstration, a material from a new class of multiferroic oxides is selected, namely bismuth-based layered oxides, for the transfer. A water-soluble sacrificial layer of Sr<sub>3</sub>Al<sub>2</sub>O<sub>6</sub> is inserted between the oxide substrate and the film, enabling the release of the film from the original substrate onto a polymer support layer. The films are transferred onto new substrates of silicon and lithium niobate (LiNbO<sub>3</sub>) and the polymer layer is removed. These substrates allow for the future design of electronic and optical devices as well as sensors using this new group of multiferroic layered oxide films.","PeriodicalId":29791,"journal":{"name":"Small Science","volume":"72 1","pages":""},"PeriodicalIF":11.1000,"publicationDate":"2024-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Large Area Transfer of Bismuth-Based Layered Oxide Thin Films Using a Flexible Polymer Transfer Method\",\"authors\":\"James P. Barnard, Jianan Shen, Benson Kunhung Tsai, Yizhi Zhang, Max R. Chhabra, Ke Xu, Xinghang Zhang, Raktim Sarma, Aleem Siddiqui, Haiyan Wang\",\"doi\":\"10.1002/smsc.202400114\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Magnetic and ferroelectric oxide thin films have long been studied for their applications in electronics, optics, and sensors. The properties of these oxide thin films are highly dependent on the film growth quality and conditions. To maximize the film quality, epitaxial oxide thin films are frequently grown on single-crystal oxide substrates such as strontium titanate (SrTiO<sub>3</sub>) and lanthanum aluminate (LaAlO<sub>3</sub>) to satisfy lattice matching and minimize defect formation. However, these single-crystal oxide substrates cannot readily be used in practical applications due to their high cost, limited availability, and small wafer sizes. One leading solution to this challenge is film transfer. In this demonstration, a material from a new class of multiferroic oxides is selected, namely bismuth-based layered oxides, for the transfer. A water-soluble sacrificial layer of Sr<sub>3</sub>Al<sub>2</sub>O<sub>6</sub> is inserted between the oxide substrate and the film, enabling the release of the film from the original substrate onto a polymer support layer. The films are transferred onto new substrates of silicon and lithium niobate (LiNbO<sub>3</sub>) and the polymer layer is removed. These substrates allow for the future design of electronic and optical devices as well as sensors using this new group of multiferroic layered oxide films.\",\"PeriodicalId\":29791,\"journal\":{\"name\":\"Small Science\",\"volume\":\"72 1\",\"pages\":\"\"},\"PeriodicalIF\":11.1000,\"publicationDate\":\"2024-06-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Small Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1002/smsc.202400114\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Small Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/smsc.202400114","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

长期以来,人们一直在研究磁性和铁电氧化物薄膜在电子、光学和传感器中的应用。这些氧化物薄膜的特性在很大程度上取决于薄膜的生长质量和条件。为了最大限度地提高薄膜质量,外延氧化物薄膜通常生长在钛酸锶(SrTiO3)和铝酸镧(LaAlO3)等单晶氧化物基底上,以满足晶格匹配并最大限度地减少缺陷的形成。然而,这些单晶氧化物基底由于成本高、供应有限和晶圆尺寸小,无法在实际应用中轻易使用。薄膜转移是解决这一难题的主要方法之一。在本演示中,我们选择了一类新型多铁性氧化物材料,即铋基层状氧化物,用于薄膜转移。在氧化物基底和薄膜之间插入一层水溶性 Sr3Al2O6 牺牲层,使薄膜从原始基底释放到聚合物支撑层上。薄膜被转移到新的硅和铌酸锂(LiNbO3)基底上,然后移除聚合物层。利用这些基底,未来可设计出使用这组新型多铁性层状氧化物薄膜的电子和光学设备以及传感器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Large Area Transfer of Bismuth-Based Layered Oxide Thin Films Using a Flexible Polymer Transfer Method

Large Area Transfer of Bismuth-Based Layered Oxide Thin Films Using a Flexible Polymer Transfer Method
Magnetic and ferroelectric oxide thin films have long been studied for their applications in electronics, optics, and sensors. The properties of these oxide thin films are highly dependent on the film growth quality and conditions. To maximize the film quality, epitaxial oxide thin films are frequently grown on single-crystal oxide substrates such as strontium titanate (SrTiO3) and lanthanum aluminate (LaAlO3) to satisfy lattice matching and minimize defect formation. However, these single-crystal oxide substrates cannot readily be used in practical applications due to their high cost, limited availability, and small wafer sizes. One leading solution to this challenge is film transfer. In this demonstration, a material from a new class of multiferroic oxides is selected, namely bismuth-based layered oxides, for the transfer. A water-soluble sacrificial layer of Sr3Al2O6 is inserted between the oxide substrate and the film, enabling the release of the film from the original substrate onto a polymer support layer. The films are transferred onto new substrates of silicon and lithium niobate (LiNbO3) and the polymer layer is removed. These substrates allow for the future design of electronic and optical devices as well as sensors using this new group of multiferroic layered oxide films.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
CiteScore
14.00
自引率
2.40%
发文量
0
期刊介绍: Small Science is a premium multidisciplinary open access journal dedicated to publishing impactful research from all areas of nanoscience and nanotechnology. It features interdisciplinary original research and focused review articles on relevant topics. The journal covers design, characterization, mechanism, technology, and application of micro-/nanoscale structures and systems in various fields including physics, chemistry, materials science, engineering, environmental science, life science, biology, and medicine. It welcomes innovative interdisciplinary research and its readership includes professionals from academia and industry in fields such as chemistry, physics, materials science, biology, engineering, and environmental and analytical science. Small Science is indexed and abstracted in CAS, DOAJ, Clarivate Analytics, ProQuest Central, Publicly Available Content Database, Science Database, SCOPUS, and Web of Science.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信