石墨烯的艺术蚀刻

IF 5.4 2区 医学 Q2 MATERIALS SCIENCE, BIOMATERIALS
Gayathri Devi N, The-Hung Mai, Ram K. Gupta and Phuong V. Pham
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引用次数: 0

摘要

在碳氢化合物(如 CH4、C3H8、C2H6 等)的辅助下,使用化学气相沉积 (CVD) 技术在金属基底上生长石墨烯时,会形成碳簇、无定形碳或其他结构。这些碳种被认为是不需要的杂质;因此,在 CVD 石墨烯生长的同时,需要使用传统的蚀刻步骤,使用蚀刻剂去除这些杂质。同时,艺术蚀刻是一种特定的方法,通过采用复杂而精确的蚀刻参数或综合生长/蚀刻模式,产生可控的非欧几里得和欧几里得几何形状。H2、O2、CH4、Ar 等剂被用作艺术蚀刻剂,以支持艺术蚀刻技术。这种技术可以生成纳米孔并定制石墨烯的特性,从而促进纳米器件、纳米传感器、纳米过滤器等特定应用。本综述探讨了在化学气相沉积过程中,前驱气体如何同时诱导石墨烯生长和艺术蚀刻,从而产生精美的蚀刻图案。此外,它还讨论了创建这些图案的技术。最后,还讨论了这些非欧几里得和欧几里得艺术蚀刻石墨烯几何图形所面临的挑战、用途和前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Art etching of graphene

Art etching of graphene

Art etching of graphene

The growth of graphene on a metal substrate using chemical vapor deposition (CVD), assisted by hydrocarbons such as CH4, C3H8, C2H6, etc. leads to the formation of carbon clusters, amorphous carbon, or any other structure. These carbon species are considered as unwanted impurities; thus a conventional etching step is used simultaneously with CVD graphene growth to remove them using an etching agent. Meanwhile, art etching is a specific method of producing controlled non-Euclidean and Euclidean geometries by employing intricate and precise etching parameters or integrated growth/etching modes. Agents such as H2, O2, CH4, Ar, and others are applied as art etching agents to support the art etching technology. This technique can generate nanopores and customize the properties of graphene, facilitating specific applications such as nanodevices, nanosensors, nanofilters, etc. This comprehensive review investigates how precursor gases concurrently induce graphene growth and art etching during a chemical vapor deposition process, resulting in beautifully etched patterns. Furthermore, it discusses the techniques leading to the creation of these patterns. Finally, the challenges, uses, and perspectives of these non-Euclidean and Euclidean-shaped art etched graphene geometries are discussed.

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来源期刊
ACS Biomaterials Science & Engineering
ACS Biomaterials Science & Engineering Materials Science-Biomaterials
CiteScore
10.30
自引率
3.40%
发文量
413
期刊介绍: ACS Biomaterials Science & Engineering is the leading journal in the field of biomaterials, serving as an international forum for publishing cutting-edge research and innovative ideas on a broad range of topics: Applications and Health – implantable tissues and devices, prosthesis, health risks, toxicology Bio-interactions and Bio-compatibility – material-biology interactions, chemical/morphological/structural communication, mechanobiology, signaling and biological responses, immuno-engineering, calcification, coatings, corrosion and degradation of biomaterials and devices, biophysical regulation of cell functions Characterization, Synthesis, and Modification – new biomaterials, bioinspired and biomimetic approaches to biomaterials, exploiting structural hierarchy and architectural control, combinatorial strategies for biomaterials discovery, genetic biomaterials design, synthetic biology, new composite systems, bionics, polymer synthesis Controlled Release and Delivery Systems – biomaterial-based drug and gene delivery, bio-responsive delivery of regulatory molecules, pharmaceutical engineering Healthcare Advances – clinical translation, regulatory issues, patient safety, emerging trends Imaging and Diagnostics – imaging agents and probes, theranostics, biosensors, monitoring Manufacturing and Technology – 3D printing, inks, organ-on-a-chip, bioreactor/perfusion systems, microdevices, BioMEMS, optics and electronics interfaces with biomaterials, systems integration Modeling and Informatics Tools – scaling methods to guide biomaterial design, predictive algorithms for structure-function, biomechanics, integrating bioinformatics with biomaterials discovery, metabolomics in the context of biomaterials Tissue Engineering and Regenerative Medicine – basic and applied studies, cell therapies, scaffolds, vascularization, bioartificial organs, transplantation and functionality, cellular agriculture
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