{"title":"在类石墨烯底涂层上合成的高纹理氮化铝薄膜","authors":"D.M. Sedlovets, V.I. Korepanov, M.A. Knyazev","doi":"10.1016/j.matlet.2024.136906","DOIUrl":null,"url":null,"abstract":"<div><p>Piezoelectric properties of polycrystalline AlN films are strongly dependent on the texture of the material. For a number of applications, such as microelectromechanical systems (MEMS) and acoustic resonators, it is important to have a well-defined (0<!--> <!-->0<!--> <!-->2) orientation of the crystallites. Using an original method of selective deposition of graphene-like films (GLFs) followed by a simple, safe and efficient chemical vapor deposition (CVD) of AlN, we clearly demonstrate that the GLF sublayer does enhance the texture quality of AlN columnar structures. The improved crystal orientation along the (0<!--> <!-->0<!--> <!-->2) direction for AlN film grown on GLFs is locally visualized using a scanning electron microscope (SEM) and quantitatively reinforced using Raman spectroscopy.</p></div>","PeriodicalId":384,"journal":{"name":"Materials Letters","volume":null,"pages":null},"PeriodicalIF":2.7000,"publicationDate":"2024-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Highly textured AlN film synthesized on a graphene-like undercoating\",\"authors\":\"D.M. Sedlovets, V.I. Korepanov, M.A. Knyazev\",\"doi\":\"10.1016/j.matlet.2024.136906\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Piezoelectric properties of polycrystalline AlN films are strongly dependent on the texture of the material. For a number of applications, such as microelectromechanical systems (MEMS) and acoustic resonators, it is important to have a well-defined (0<!--> <!-->0<!--> <!-->2) orientation of the crystallites. Using an original method of selective deposition of graphene-like films (GLFs) followed by a simple, safe and efficient chemical vapor deposition (CVD) of AlN, we clearly demonstrate that the GLF sublayer does enhance the texture quality of AlN columnar structures. The improved crystal orientation along the (0<!--> <!-->0<!--> <!-->2) direction for AlN film grown on GLFs is locally visualized using a scanning electron microscope (SEM) and quantitatively reinforced using Raman spectroscopy.</p></div>\",\"PeriodicalId\":384,\"journal\":{\"name\":\"Materials Letters\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.7000,\"publicationDate\":\"2024-06-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials Letters\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0167577X24010450\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Letters","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0167577X24010450","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Highly textured AlN film synthesized on a graphene-like undercoating
Piezoelectric properties of polycrystalline AlN films are strongly dependent on the texture of the material. For a number of applications, such as microelectromechanical systems (MEMS) and acoustic resonators, it is important to have a well-defined (0 0 2) orientation of the crystallites. Using an original method of selective deposition of graphene-like films (GLFs) followed by a simple, safe and efficient chemical vapor deposition (CVD) of AlN, we clearly demonstrate that the GLF sublayer does enhance the texture quality of AlN columnar structures. The improved crystal orientation along the (0 0 2) direction for AlN film grown on GLFs is locally visualized using a scanning electron microscope (SEM) and quantitatively reinforced using Raman spectroscopy.
期刊介绍:
Materials Letters has an open access mirror journal Materials Letters: X, sharing the same aims and scope, editorial team, submission system and rigorous peer review.
Materials Letters is dedicated to publishing novel, cutting edge reports of broad interest to the materials community. The journal provides a forum for materials scientists and engineers, physicists, and chemists to rapidly communicate on the most important topics in the field of materials.
Contributions include, but are not limited to, a variety of topics such as:
• Materials - Metals and alloys, amorphous solids, ceramics, composites, polymers, semiconductors
• Applications - Structural, opto-electronic, magnetic, medical, MEMS, sensors, smart
• Characterization - Analytical, microscopy, scanning probes, nanoscopic, optical, electrical, magnetic, acoustic, spectroscopic, diffraction
• Novel Materials - Micro and nanostructures (nanowires, nanotubes, nanoparticles), nanocomposites, thin films, superlattices, quantum dots.
• Processing - Crystal growth, thin film processing, sol-gel processing, mechanical processing, assembly, nanocrystalline processing.
• Properties - Mechanical, magnetic, optical, electrical, ferroelectric, thermal, interfacial, transport, thermodynamic
• Synthesis - Quenching, solid state, solidification, solution synthesis, vapor deposition, high pressure, explosive