{"title":"用于大功率中红外激光器的铌酸锂抗反射亚波长结构的纳米加工","authors":"Jia-Xin Zheng, Xue-Qing Liu, Ke-Shuai Tian, Hong-Yu Li, Xin Zhang, Zhen-Nan Tian, Meng-Dan Qian, Lei Wang, Qi-Dai Chen","doi":"10.1002/lpor.202400546","DOIUrl":null,"url":null,"abstract":"Lithium niobate (LN) crystal with anti-reflective subwavelength structures (ASSs) has great applications in high-power tunable optical parametric oscillator (OPO) lasers. However, it is still a great challenge to 3D nanofabrication of LN ASSs. Herein, a wet-etching-assisted laser polarization domain inversion (WE-LPDI) technology is proposed to fabricate periodic cone arrays with a period from 200 nm to 4 µm on LN. Based on the optimized structural parameters, large-area LN ASSs with a period of 1.3 µm and a height of 1.7 µm were fabricated on LN, which exhibits an average transmittance of 3–5 µm increasing from 78% to 85% and a highest transmittance of 88% at 5 µm. It has been demonstrated that the LN ASSs show high stability under high-temperature and high-power laser irradiation, which shows potential applications for high-power mid-IR lasers. The results indicate that the WE-LPDI technology provides a novel way for 3D nanofabrication of LN.","PeriodicalId":204,"journal":{"name":"Laser & Photonics Reviews","volume":null,"pages":null},"PeriodicalIF":9.8000,"publicationDate":"2024-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanofabrication of Lithium Niobate Anti-Reflective Subwavelength Structures for High Power Mid-Infrared Lasers\",\"authors\":\"Jia-Xin Zheng, Xue-Qing Liu, Ke-Shuai Tian, Hong-Yu Li, Xin Zhang, Zhen-Nan Tian, Meng-Dan Qian, Lei Wang, Qi-Dai Chen\",\"doi\":\"10.1002/lpor.202400546\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Lithium niobate (LN) crystal with anti-reflective subwavelength structures (ASSs) has great applications in high-power tunable optical parametric oscillator (OPO) lasers. However, it is still a great challenge to 3D nanofabrication of LN ASSs. Herein, a wet-etching-assisted laser polarization domain inversion (WE-LPDI) technology is proposed to fabricate periodic cone arrays with a period from 200 nm to 4 µm on LN. Based on the optimized structural parameters, large-area LN ASSs with a period of 1.3 µm and a height of 1.7 µm were fabricated on LN, which exhibits an average transmittance of 3–5 µm increasing from 78% to 85% and a highest transmittance of 88% at 5 µm. It has been demonstrated that the LN ASSs show high stability under high-temperature and high-power laser irradiation, which shows potential applications for high-power mid-IR lasers. The results indicate that the WE-LPDI technology provides a novel way for 3D nanofabrication of LN.\",\"PeriodicalId\":204,\"journal\":{\"name\":\"Laser & Photonics Reviews\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":9.8000,\"publicationDate\":\"2024-06-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Laser & Photonics Reviews\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1002/lpor.202400546\",\"RegionNum\":1,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Laser & Photonics Reviews","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1002/lpor.202400546","RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"OPTICS","Score":null,"Total":0}
Nanofabrication of Lithium Niobate Anti-Reflective Subwavelength Structures for High Power Mid-Infrared Lasers
Lithium niobate (LN) crystal with anti-reflective subwavelength structures (ASSs) has great applications in high-power tunable optical parametric oscillator (OPO) lasers. However, it is still a great challenge to 3D nanofabrication of LN ASSs. Herein, a wet-etching-assisted laser polarization domain inversion (WE-LPDI) technology is proposed to fabricate periodic cone arrays with a period from 200 nm to 4 µm on LN. Based on the optimized structural parameters, large-area LN ASSs with a period of 1.3 µm and a height of 1.7 µm were fabricated on LN, which exhibits an average transmittance of 3–5 µm increasing from 78% to 85% and a highest transmittance of 88% at 5 µm. It has been demonstrated that the LN ASSs show high stability under high-temperature and high-power laser irradiation, which shows potential applications for high-power mid-IR lasers. The results indicate that the WE-LPDI technology provides a novel way for 3D nanofabrication of LN.
期刊介绍:
Laser & Photonics Reviews is a reputable journal that publishes high-quality Reviews, original Research Articles, and Perspectives in the field of photonics and optics. It covers both theoretical and experimental aspects, including recent groundbreaking research, specific advancements, and innovative applications.
As evidence of its impact and recognition, Laser & Photonics Reviews boasts a remarkable 2022 Impact Factor of 11.0, according to the Journal Citation Reports from Clarivate Analytics (2023). Moreover, it holds impressive rankings in the InCites Journal Citation Reports: in 2021, it was ranked 6th out of 101 in the field of Optics, 15th out of 161 in Applied Physics, and 12th out of 69 in Condensed Matter Physics.
The journal uses the ISSN numbers 1863-8880 for print and 1863-8899 for online publications.