通过蒙特卡洛模拟研究不同样品温度下梯形线的线扫描剖面。

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-06-25 DOI:10.1111/jmi.13343

Peng Zhang

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引用次数: 0

摘要

本研究通过蒙特卡洛模拟，研究了不同侧壁角的硅梯形线的样品固有温度对线扫描剖面的影响。研究表明，线扫描剖面随温度的变化而变化，尤其是 "肩"，侧壁角越大，"肩 "越明显。二次电子剖面的对比度在一次电子能量较低时增大，但在 PE 能量相对较高时随着温度的升高而减小。反向散射电子剖面的趋势类似，但不那么明显。研究详细讨论了其基本机制。这项研究有望为利用扫描电子显微镜测量纳米结构的温度提供有价值的见解。

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Study on line-scan profile for a trapezoid line under varying sample temperatures through Monte–Carlo simulation

This study investigates the influence of the sample inherent temperature on the line-scan profile for a silicon trapezoid line with different sidewall angles by Monte–Carlo simulation. This study demonstrates that the profile varies with temperature, particularly focusing on the ‘shoulder’, which becomes more pronounced with larger sidewall angles. The contrast of the secondary electron profile increases at low primary electron energy but decreases at relatively high PE energy as the temperature rises. The trend of the backscattering electron profile is similar but less noticeable. The underlying mechanism is discussed in detail. This study has potential to provide valuable insights into thermometry in nanostructures using SEMs.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.