Arindam Majhi, Riley Shurvinton, Paresh Chandra Pradhan, Matthew Hand, Weichen Gu, Murilo Bazan Da Silva, Simone Moriconi, Ioana Nistea, Simon G Alcock, Hongchang Wang, Kawal Sawhney
{"title":"利用离子束制造的亚纳米级 X 射线反射镜。","authors":"Arindam Majhi, Riley Shurvinton, Paresh Chandra Pradhan, Matthew Hand, Weichen Gu, Murilo Bazan Da Silva, Simone Moriconi, Ioana Nistea, Simon G Alcock, Hongchang Wang, Kawal Sawhney","doi":"10.1107/S1600577524004594","DOIUrl":null,"url":null,"abstract":"<p><p>Ion beam figuring (IBF) is a powerful technique for figure correction of X-ray mirrors to a high accuracy. Here, recent technical advancements in the IBF instrument developed at Diamond Light Source are presented and experimental results for figuring of X-ray mirrors are given. The IBF system is equipped with a stable DC gridded ion source (120 mm diameter), a four-axis motion stage to manipulate the optic, a Faraday cup to monitor the ion-beam current, and a camera for alignment. A novel laser speckle angular measurement instrument also provides on-board metrology. To demonstrate the IBF system's capabilities, two silicon X-ray mirrors were processed. For 1D correction, a height error of 0.08 nm r.m.s. and a slope error of 44 nrad r.m.s. were achieved. For 2D correction over a 67 mm × 17 mm clear aperture, a height error of 0.8 nm r.m.s. and a slope error of 230 nrad r.m.s. were obtained. For the 1D case, this optical quality is comparable with the highest-grade, commercially available, X-ray optics.</p>","PeriodicalId":48729,"journal":{"name":"Journal of Synchrotron Radiation","volume":null,"pages":null},"PeriodicalIF":2.5000,"publicationDate":"2024-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11226171/pdf/","citationCount":"0","resultStr":"{\"title\":\"Sub-nanometre quality X-ray mirrors created using ion beam figuring.\",\"authors\":\"Arindam Majhi, Riley Shurvinton, Paresh Chandra Pradhan, Matthew Hand, Weichen Gu, Murilo Bazan Da Silva, Simone Moriconi, Ioana Nistea, Simon G Alcock, Hongchang Wang, Kawal Sawhney\",\"doi\":\"10.1107/S1600577524004594\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<p><p>Ion beam figuring (IBF) is a powerful technique for figure correction of X-ray mirrors to a high accuracy. Here, recent technical advancements in the IBF instrument developed at Diamond Light Source are presented and experimental results for figuring of X-ray mirrors are given. The IBF system is equipped with a stable DC gridded ion source (120 mm diameter), a four-axis motion stage to manipulate the optic, a Faraday cup to monitor the ion-beam current, and a camera for alignment. A novel laser speckle angular measurement instrument also provides on-board metrology. To demonstrate the IBF system's capabilities, two silicon X-ray mirrors were processed. For 1D correction, a height error of 0.08 nm r.m.s. and a slope error of 44 nrad r.m.s. were achieved. For 2D correction over a 67 mm × 17 mm clear aperture, a height error of 0.8 nm r.m.s. and a slope error of 230 nrad r.m.s. were obtained. For the 1D case, this optical quality is comparable with the highest-grade, commercially available, X-ray optics.</p>\",\"PeriodicalId\":48729,\"journal\":{\"name\":\"Journal of Synchrotron Radiation\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":2.5000,\"publicationDate\":\"2024-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11226171/pdf/\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Synchrotron Radiation\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1107/S1600577524004594\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"2024/6/21 0:00:00\",\"PubModel\":\"Epub\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Synchrotron Radiation","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1107/S1600577524004594","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2024/6/21 0:00:00","PubModel":"Epub","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
离子束校正(IBF)是一种强大的技术,可以高精度地校正 X 射线反射镜的形状。本文介绍了钻石光源开发的 IBF 仪器的最新技术进展,并给出了 X 射线反射镜图形校正的实验结果。IBF 系统配备了一个稳定的直流格栅离子源(直径 120 毫米)、一个用于操纵光学镜的四轴运动平台、一个用于监测离子束电流的法拉第杯和一个用于校准的摄像头。新颖的激光斑点角度测量仪也提供了机载计量功能。为了展示 IBF 系统的能力,对两个硅 X 射线反射镜进行了处理。在一维校正方面,高度误差为 0.08 nm r.m.s.,斜率误差为 44 nrad r.m.s.。在 67 mm × 17 mm 的透明孔径上进行 2D 校正时,高度误差为 0.8 nm r.m.s.,斜率误差为 230 nrad r.m.s.。在一维情况下,这一光学质量可与市场上最高级的 X 射线光学器件相媲美。
Sub-nanometre quality X-ray mirrors created using ion beam figuring.
Ion beam figuring (IBF) is a powerful technique for figure correction of X-ray mirrors to a high accuracy. Here, recent technical advancements in the IBF instrument developed at Diamond Light Source are presented and experimental results for figuring of X-ray mirrors are given. The IBF system is equipped with a stable DC gridded ion source (120 mm diameter), a four-axis motion stage to manipulate the optic, a Faraday cup to monitor the ion-beam current, and a camera for alignment. A novel laser speckle angular measurement instrument also provides on-board metrology. To demonstrate the IBF system's capabilities, two silicon X-ray mirrors were processed. For 1D correction, a height error of 0.08 nm r.m.s. and a slope error of 44 nrad r.m.s. were achieved. For 2D correction over a 67 mm × 17 mm clear aperture, a height error of 0.8 nm r.m.s. and a slope error of 230 nrad r.m.s. were obtained. For the 1D case, this optical quality is comparable with the highest-grade, commercially available, X-ray optics.
期刊介绍:
Synchrotron radiation research is rapidly expanding with many new sources of radiation being created globally. Synchrotron radiation plays a leading role in pure science and in emerging technologies. The Journal of Synchrotron Radiation provides comprehensive coverage of the entire field of synchrotron radiation and free-electron laser research including instrumentation, theory, computing and scientific applications in areas such as biology, nanoscience and materials science. Rapid publication ensures an up-to-date information resource for scientists and engineers in the field.