利用激光差分共焦-原子力探针技术高分辨率测量激光融合靶内外三维表面轮廓的方法

IF 10.1 1区 工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY
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引用次数: 0

摘要

激光聚变靶内外三维(3D)表面轮廓的高分辨率无损共参照测量难以实现。在本研究中,我们提出了一种激光差分共焦(LDC)-原子力探针(AFP)方法,用于高分辨率测量激光聚变靶内外三维表面轮廓。该方法利用 LDC 方法检测原子力探针的偏转,并利用原子力探针的高空间分辨率来提高外轮廓测量的空间分辨率。利用 LDC 方法的断层扫描特性,实现了对目标内部轮廓的无损和共参照测量。此外,通过使用水平回转轴对目标进行多次重新定位,获得了目标的内外三维表面轮廓以及整个表面的功率谱评估。实验结果表明,外轮廓测量的轴向和横向分辨率分别为 0.5 和 1.3 nm,而内轮廓测量的轴向和横向分辨率分别为 2.0 nm 和大约 400.0 nm。目标外轮廓和内轮廓测量的均方根偏差重复性分别为 2.6 和 2.4 nm。我们相信,我们的研究为高分辨率和无损共参照测量激光聚变目标的内外三维轮廓提供了一种可行的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A High-Resolution Measurement Method for Inner and Outer 3D Surface Profiles of Laser Fusion Targets Using a Laser Differential Confocal–Atomic Force Probe Technique
The high-resolution and nondestructive co-reference measurement of the inner and outer three-dimensional (3D) surface profiles of laser fusion targets is difficult to achieve. In this study, we propose a laser differential confocal (LDC)–atomic force probe (AFP) method to measure the inner and outer 3D surface profiles of laser fusion targets at a high resolution. This method utilizes the LDC method to detect the deflection of the AFP and exploits the high spatial resolution of the AFP to enhance the spatial resolution of the outer profile measurement. Nondestructive and co-reference measurements of the inner profile of a target were achieved using the tomographic characteristics of the LDC method. Furthermore, by combining multiple repositionings of the target using a horizontal slewing shaft, the inner and outer 3D surface profiles of the target were obtained, along with a power spectrum assessment of the entire surface. The experimental results revealed that the respective axial and lateral resolutions of the outer profile measurement were 0.5 and 1.3 nm, while the respective axial and lateral resolutions of the inner profile measurement were 2.0 nm and approximately 400.0 nm. The repeatabilities of the root-mean-square deviation measurements for the outer and inner profiles of the target were 2.6 and 2.4 nm, respectively. We believe our study provides a promising method for the high-resolution and nondestructive co-reference measurement of the inner and outer 3D profiles of laser fusion targets.
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来源期刊
Engineering
Engineering Environmental Science-Environmental Engineering
自引率
1.60%
发文量
335
审稿时长
35 days
期刊介绍: Engineering, an international open-access journal initiated by the Chinese Academy of Engineering (CAE) in 2015, serves as a distinguished platform for disseminating cutting-edge advancements in engineering R&D, sharing major research outputs, and highlighting key achievements worldwide. The journal's objectives encompass reporting progress in engineering science, fostering discussions on hot topics, addressing areas of interest, challenges, and prospects in engineering development, while considering human and environmental well-being and ethics in engineering. It aims to inspire breakthroughs and innovations with profound economic and social significance, propelling them to advanced international standards and transforming them into a new productive force. Ultimately, this endeavor seeks to bring about positive changes globally, benefit humanity, and shape a new future.
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