通过生长调整控制应力对蓝宝石上生长的氮化铝边缘线位错密度的影响

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-06-07 DOI:10.1088/1361-6641/ad5581

Yuheng Zhang, Jing Yang, F. Liang, Zongshun Liu, Yufei Hou, Bing Liu, Fu Zheng, Xuefeng Liu, Degang Zhao

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引用次数: 0

摘要

研究了 MOCVD 氮化铝外延层中应力与位错密度之间的关系。研究发现，氮化铝（AlN）外延层在晶体岛合并时会产生拉伸应力。通过控制三维生长末端晶体岛的大小和密度，可以有效降低外延过程中产生的拉应力。力学计算表明，AlN 的边缘线位错密度与生长过程中的拉伸应力之间存在线性关系。通过将氮化铝生长过程中的应力控制在 0.1 Gpa 以下，可获得边缘线位错密度为 6.31 × 107 cm-2 的高质量氮化铝样品。

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Effect of stress control by growth adjustment on the edge thread dislocation density of AlN grown on the sapphire

The relationship between stress and dislocation density in MOCVD epitaxial AlN was studied. It has been found that the aluminum nitride (AlN) epitaxial layer generates tensile stress when the crystal islands are merged. By controlling the size and density of crystal islands at the end of 3D growth, the tensile stress generated during epitaxy can be effectively reduced. Mechanical calculations show that there is a linear relationship between the edge thread dislocations density of AlN and the tensile stress during growth. By controlling the stress during AlN growth below 0.1 Gpa, a high-quality AlN sample with an edge thread dislocation density of 6.31 × 107 cm−2 was obtained.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.