基于全场成像泵探反射仪的石英和熔融石英 GHz 弹性表面波速度测量法

IF 7.1 1区医学 Q1 ENGINEERING, BIOMEDICAL

Photoacoustics Pub Date : 2024-06-11 DOI:10.1016/j.pacs.2024.100627

Ruben Burger , Goran E. Hallum , Ramon Auer , Dennis Schweiger , David Redka , Matthias Domke , Christian U. Grosse , Heinz P. Huber , Datong Wu

{"title":"基于全场成像泵探反射仪的石英和熔融石英 GHz 弹性表面波速度测量法","authors":"Ruben Burger , Goran E. Hallum , Ramon Auer , Dennis Schweiger , David Redka , Matthias Domke , Christian U. Grosse , Heinz P. Huber , Datong Wu","doi":"10.1016/j.pacs.2024.100627","DOIUrl":null,"url":null,"abstract":"<div><p>This study reports an imaging method for gigahertz surface acoustic waves in transparent layers using infrared subpicosecond laser pulses in the ablation regime and an optical pump–probe technique. The reflectivity modulations due to the photoelastic effect of generated multimodal surface acoustic waves were imaged by an sCMOS camera illuminated by the time-delayed, frequency-doubled probe pulses. Moving the delay time between <span><math><mrow><mn>6</mn><mo>.</mo><mn>0</mn><mspace></mspace><mstyle><mi>n</mi><mi>s</mi></mstyle><mspace></mspace><mtext>to</mtext><mspace></mspace><mn>11</mn><mo>.</mo><mn>5</mn><mspace></mspace><mstyle><mi>n</mi><mi>s</mi></mstyle></mrow></math></span>, image stacks of wave field propagation were created.</p><p>Two representative samples were investigated: wafers of isotropic fused silica and anisotropic x-cut quartz. Rayleigh (SAW) and longitudinal dominant high-velocity pseudo-surface acoustic wave (HVPSAW) modes could be observed and tracked along a circular grid around the excitation center, allowing the extraction of angular profiles of the propagation velocity. In quartz, the folding of a PSAW was observed. A finite element simulation was developed to predict the measurement results. The simulation and measurement were in good agreement with a relative error of 2% to 5%.</p><p>These results show the potential for fast and full-field imaging of laser-generated ultrasonic surface wave modes, which can be utilized for the characterization of thin transparent samples such as semiconductor wafers or optical crystals in the gigahertz frequency range.</p></div>","PeriodicalId":56025,"journal":{"name":"Photoacoustics","volume":"38 ","pages":"Article 100627"},"PeriodicalIF":7.1000,"publicationDate":"2024-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2213597924000442/pdfft?md5=e6bae6dc141e1cc40d052885a2123705&pid=1-s2.0-S2213597924000442-main.pdf","citationCount":"0","resultStr":"{\"title\":\"Velocimetry of GHz elastic surface waves in quartz and fused silica based on full-field imaging of pump–probe reflectometry\",\"authors\":\"Ruben Burger , Goran E. Hallum , Ramon Auer , Dennis Schweiger , David Redka , Matthias Domke , Christian U. Grosse , Heinz P. Huber , Datong Wu\",\"doi\":\"10.1016/j.pacs.2024.100627\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>This study reports an imaging method for gigahertz surface acoustic waves in transparent layers using infrared subpicosecond laser pulses in the ablation regime and an optical pump–probe technique. The reflectivity modulations due to the photoelastic effect of generated multimodal surface acoustic waves were imaged by an sCMOS camera illuminated by the time-delayed, frequency-doubled probe pulses. Moving the delay time between <span><math><mrow><mn>6</mn><mo>.</mo><mn>0</mn><mspace></mspace><mstyle><mi>n</mi><mi>s</mi></mstyle><mspace></mspace><mtext>to</mtext><mspace></mspace><mn>11</mn><mo>.</mo><mn>5</mn><mspace></mspace><mstyle><mi>n</mi><mi>s</mi></mstyle></mrow></math></span>, image stacks of wave field propagation were created.</p><p>Two representative samples were investigated: wafers of isotropic fused silica and anisotropic x-cut quartz. Rayleigh (SAW) and longitudinal dominant high-velocity pseudo-surface acoustic wave (HVPSAW) modes could be observed and tracked along a circular grid around the excitation center, allowing the extraction of angular profiles of the propagation velocity. In quartz, the folding of a PSAW was observed. A finite element simulation was developed to predict the measurement results. The simulation and measurement were in good agreement with a relative error of 2% to 5%.</p><p>These results show the potential for fast and full-field imaging of laser-generated ultrasonic surface wave modes, which can be utilized for the characterization of thin transparent samples such as semiconductor wafers or optical crystals in the gigahertz frequency range.</p></div>\",\"PeriodicalId\":56025,\"journal\":{\"name\":\"Photoacoustics\",\"volume\":\"38 \",\"pages\":\"Article 100627\"},\"PeriodicalIF\":7.1000,\"publicationDate\":\"2024-06-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.sciencedirect.com/science/article/pii/S2213597924000442/pdfft?md5=e6bae6dc141e1cc40d052885a2123705&pid=1-s2.0-S2213597924000442-main.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photoacoustics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2213597924000442\",\"RegionNum\":1,\"RegionCategory\":\"医学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, BIOMEDICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photoacoustics","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2213597924000442","RegionNum":1,"RegionCategory":"医学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, BIOMEDICAL","Score":null,"Total":0}

引用次数: 0

摘要

本研究报告了一种利用红外亚皮秒激光脉冲消融机制和光学泵浦探针技术对透明层中的千兆赫表面声波进行成像的方法。产生的多模态表面声波的光弹性效应引起的反射率调制由一台 sCMOS 相机在延时倍频探针脉冲的照射下进行成像。在 6.0nst 至 11.5ns 之间移动延迟时间，可创建波场传播的图像堆栈。研究了两种具有代表性的样品：各向同性的熔融石英晶片和各向异性的 x 切面石英。可以沿激励中心周围的圆形网格观察和跟踪瑞利（SAW）模式和纵向主导高速伪表面声波（HVPSAW）模式，从而提取传播速度的角度剖面图。在石英中，观察到了 PSAW 的折叠。为预测测量结果，开发了有限元模拟。这些结果表明，激光产生的超声表面波模式具有快速全场成像的潜力，可用于表征千兆赫频率范围内的半导体晶片或光学晶体等薄透明样品。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Velocimetry of GHz elastic surface waves in quartz and fused silica based on full-field imaging of pump–probe reflectometry

查看原文本刊更多论文

Velocimetry of GHz elastic surface waves in quartz and fused silica based on full-field imaging of pump–probe reflectometry

This study reports an imaging method for gigahertz surface acoustic waves in transparent layers using infrared subpicosecond laser pulses in the ablation regime and an optical pump–probe technique. The reflectivity modulations due to the photoelastic effect of generated multimodal surface acoustic waves were imaged by an sCMOS camera illuminated by the time-delayed, frequency-doubled probe pulses. Moving the delay time between $6.0 n s to 11.5 n s$ , image stacks of wave field propagation were created.

Two representative samples were investigated: wafers of isotropic fused silica and anisotropic x-cut quartz. Rayleigh (SAW) and longitudinal dominant high-velocity pseudo-surface acoustic wave (HVPSAW) modes could be observed and tracked along a circular grid around the excitation center, allowing the extraction of angular profiles of the propagation velocity. In quartz, the folding of a PSAW was observed. A finite element simulation was developed to predict the measurement results. The simulation and measurement were in good agreement with a relative error of 2 % to 5 %.

These results show the potential for fast and full-field imaging of laser-generated ultrasonic surface wave modes, which can be utilized for the characterization of thin transparent samples such as semiconductor wafers or optical crystals in the gigahertz frequency range.

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来源期刊

Photoacoustics Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

11.40

自引率

16.50%

发文量

审稿时长

53 days

期刊介绍： The open access Photoacoustics journal (PACS) aims to publish original research and review contributions in the field of photoacoustics-optoacoustics-thermoacoustics. This field utilizes acoustical and ultrasonic phenomena excited by electromagnetic radiation for the detection, visualization, and characterization of various materials and biological tissues, including living organisms. Recent advancements in laser technologies, ultrasound detection approaches, inverse theory, and fast reconstruction algorithms have greatly supported the rapid progress in this field. The unique contrast provided by molecular absorption in photoacoustic-optoacoustic-thermoacoustic methods has allowed for addressing unmet biological and medical needs such as pre-clinical research, clinical imaging of vasculature, tissue and disease physiology, drug efficacy, surgery guidance, and therapy monitoring. Applications of this field encompass a wide range of medical imaging and sensing applications, including cancer, vascular diseases, brain neurophysiology, ophthalmology, and diabetes. Moreover, photoacoustics-optoacoustics-thermoacoustics is a multidisciplinary field, with contributions from chemistry and nanotechnology, where novel materials such as biodegradable nanoparticles, organic dyes, targeted agents, theranostic probes, and genetically expressed markers are being actively developed. These advanced materials have significantly improved the signal-to-noise ratio and tissue contrast in photoacoustic methods.