用于光声光谱学的高灵敏度窄带 T 型悬臂法布里珀罗声传感器

IF 7.1 1区医学 Q1 ENGINEERING, BIOMEDICAL

Photoacoustics Pub Date : 2024-06-08 DOI:10.1016/j.pacs.2024.100626

Jilong Wang , Qiaoyun Wang , Chongyue Yan , Shunyuan Xu , Xin Zou , Qiang Wu , Wai Pang Ng , Richard Binns , Yong-Qing Fu

{"title":"用于光声光谱学的高灵敏度窄带 T 型悬臂法布里珀罗声传感器","authors":"Jilong Wang , Qiaoyun Wang , Chongyue Yan , Shunyuan Xu , Xin Zou , Qiang Wu , Wai Pang Ng , Richard Binns , Yong-Qing Fu","doi":"10.1016/j.pacs.2024.100626","DOIUrl":null,"url":null,"abstract":"<div>Photoacoustic spectroscopy (PAS) has been rapidly developed and applied to different detection scenarios. The acoustic pressure detection is an important part in the PAS system. In this paper, an ultrahigh sensitivity Fabry-Perot acoustic sensor with a T-shaped cantilever was proposed. To achieve the best acoustic pressure effect, the dimension of the cantilever structure was designed and optimized by finite element analysis using COMSOL Multiphysics. Simulation results showed that the sensitivity of such T-shaped cantilever was 1.5 times higher than that based on a rectangular cantilever, and the resonance frequency of T-shaped cantilever were able to modulate from 800 Hz to 1500 Hz by adjusting the multi-parameter characteristics. Experimental sensing results showed that the resonance frequency of T-shaped Fabry-Perot acoustic sensor was 1080 Hz, yielding a high sensitivity of 1.428 μm/Pa, with a signal-to-noise ratio (SNR) of 84.8 dB and a detectable pressure limit of 1.9 μPa/Hz1/2@1 kHz. We successfully used such acoustic sensor to measure acetylene (C2H2) concentration in the PAS. The sensitivity of PAS for C2H2 gas was 3.22 pm/ppm with a concentration range of 50 ppm ∼100 ppm, and the minimum detection limit was 24.91ppb.</div>","PeriodicalId":56025,"journal":{"name":"Photoacoustics","volume":"38 ","pages":"Article 100626"},"PeriodicalIF":7.1000,"publicationDate":"2024-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.sciencedirect.com/science/article/pii/S2213597924000430/pdfft?md5=d101f4b5c522cd398db2c38d973218ed&pid=1-s2.0-S2213597924000430-main.pdf","citationCount":"0","resultStr":"{\"title\":\"High-sensitivity narrow‑band T-shaped cantilever Fabry-perot acoustic sensor for photoacoustic spectroscopy\",\"authors\":\"Jilong Wang , Qiaoyun Wang , Chongyue Yan , Shunyuan Xu , Xin Zou , Qiang Wu , Wai Pang Ng , Richard Binns , Yong-Qing Fu\",\"doi\":\"10.1016/j.pacs.2024.100626\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div>Photoacoustic spectroscopy (PAS) has been rapidly developed and applied to different detection scenarios. The acoustic pressure detection is an important part in the PAS system. In this paper, an ultrahigh sensitivity Fabry-Perot acoustic sensor with a T-shaped cantilever was proposed. To achieve the best acoustic pressure effect, the dimension of the cantilever structure was designed and optimized by finite element analysis using COMSOL Multiphysics. Simulation results showed that the sensitivity of such T-shaped cantilever was 1.5 times higher than that based on a rectangular cantilever, and the resonance frequency of T-shaped cantilever were able to modulate from 800 Hz to 1500 Hz by adjusting the multi-parameter characteristics. Experimental sensing results showed that the resonance frequency of T-shaped Fabry-Perot acoustic sensor was 1080 Hz, yielding a high sensitivity of 1.428 μm/Pa, with a signal-to-noise ratio (SNR) of 84.8 dB and a detectable pressure limit of 1.9 μPa/Hz1/2@1 kHz. We successfully used such acoustic sensor to measure acetylene (C2H2) concentration in the PAS. The sensitivity of PAS for C2H2 gas was 3.22 pm/ppm with a concentration range of 50 ppm ∼100 ppm, and the minimum detection limit was 24.91ppb.</div>\",\"PeriodicalId\":56025,\"journal\":{\"name\":\"Photoacoustics\",\"volume\":\"38 \",\"pages\":\"Article 100626\"},\"PeriodicalIF\":7.1000,\"publicationDate\":\"2024-06-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://www.sciencedirect.com/science/article/pii/S2213597924000430/pdfft?md5=d101f4b5c522cd398db2c38d973218ed&pid=1-s2.0-S2213597924000430-main.pdf\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photoacoustics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2213597924000430\",\"RegionNum\":1,\"RegionCategory\":\"医学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, BIOMEDICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photoacoustics","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2213597924000430","RegionNum":1,"RegionCategory":"医学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, BIOMEDICAL","Score":null,"Total":0}

引用次数: 0

摘要

光声光谱学（PAS）得到了快速发展，并被应用于不同的探测场景。声压探测是 PAS 系统的重要组成部分。本文提出了一种带有 T 型悬臂的超高灵敏度法布里-珀罗声学传感器。为了达到最佳声压效果，利用 COMSOL Multiphysics 进行了悬臂结构的尺寸设计和有限元分析优化。仿真结果表明，这种 T 形悬臂的灵敏度是矩形悬臂的 1.5 倍，通过调整多参数特性，T 形悬臂的共振频率可从 800 Hz 调制到 1500 Hz。实验传感结果表明，T 型法布里-珀罗声学传感器的共振频率为 1080 Hz，灵敏度高达 1.428 μm/Pa，信噪比（SNR）为 84.8 dB，可探测的压力极限为 1.9 μPa/Hz1/2@1 kHz。我们成功地利用这种声学传感器测量了 PAS 中的乙炔（C2H2）浓度。PAS 对 C2H2 气体的灵敏度为 3.22 pm/ppm，浓度范围为 50 ppm ∼ 100 ppm，最低检测限为 24.91ppb。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

High-sensitivity narrow‑band T-shaped cantilever Fabry-perot acoustic sensor for photoacoustic spectroscopy

Photoacoustic spectroscopy (PAS) has been rapidly developed and applied to different detection scenarios. The acoustic pressure detection is an important part in the PAS system. In this paper, an ultrahigh sensitivity Fabry-Perot acoustic sensor with a T-shaped cantilever was proposed. To achieve the best acoustic pressure effect, the dimension of the cantilever structure was designed and optimized by finite element analysis using COMSOL Multiphysics. Simulation results showed that the sensitivity of such T-shaped cantilever was 1.5 times higher than that based on a rectangular cantilever, and the resonance frequency of T-shaped cantilever were able to modulate from 800 Hz to 1500 Hz by adjusting the multi-parameter characteristics. Experimental sensing results showed that the resonance frequency of T-shaped Fabry-Perot acoustic sensor was 1080 Hz, yielding a high sensitivity of 1.428 μm/Pa, with a signal-to-noise ratio (SNR) of 84.8 dB and a detectable pressure limit of 1.9 μPa/Hz^1/2@1 kHz. We successfully used such acoustic sensor to measure acetylene (C₂H₂) concentration in the PAS. The sensitivity of PAS for C₂H₂ gas was 3.22 pm/ppm with a concentration range of 50 ppm ∼100 ppm, and the minimum detection limit was 24.91ppb.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Photoacoustics Physics and Astronomy-Atomic and Molecular Physics, and Optics

CiteScore

11.40

自引率

16.50%

发文量

审稿时长

53 days

期刊介绍： The open access Photoacoustics journal (PACS) aims to publish original research and review contributions in the field of photoacoustics-optoacoustics-thermoacoustics. This field utilizes acoustical and ultrasonic phenomena excited by electromagnetic radiation for the detection, visualization, and characterization of various materials and biological tissues, including living organisms. Recent advancements in laser technologies, ultrasound detection approaches, inverse theory, and fast reconstruction algorithms have greatly supported the rapid progress in this field. The unique contrast provided by molecular absorption in photoacoustic-optoacoustic-thermoacoustic methods has allowed for addressing unmet biological and medical needs such as pre-clinical research, clinical imaging of vasculature, tissue and disease physiology, drug efficacy, surgery guidance, and therapy monitoring. Applications of this field encompass a wide range of medical imaging and sensing applications, including cancer, vascular diseases, brain neurophysiology, ophthalmology, and diabetes. Moreover, photoacoustics-optoacoustics-thermoacoustics is a multidisciplinary field, with contributions from chemistry and nanotechnology, where novel materials such as biodegradable nanoparticles, organic dyes, targeted agents, theranostic probes, and genetically expressed markers are being actively developed. These advanced materials have significantly improved the signal-to-noise ratio and tissue contrast in photoacoustic methods.