Chieh-Yu Kuan, Sheng-Po Chang, Guan-Yuan Liou, S. Chang, Shoou-Jinn Chang
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Fabrication and application of two-dimensional tungsten disulfide thin film
To form a tungsten disulfide film, a tungsten trioxide film is deposited first and then hydrogen sulfide is injected into the furnace tube to sulfide the tungsten trioxide film in a high-temperature environment. Due to the need to accurately control the thickness of tungsten trioxide, the power of the RF sputtering machine was reduced as much as possible in a stable condition in the experiment and the bias voltage during each process was monitored. In this experiment, a sapphire substrate and a silicon substrate with 200[Formula: see text]nm silicon dioxide are used. Then use optical instruments such as Raman optics, ellipsometers and high-resolution electron transmission microscopes, atomic force microscopes and other instruments for further measurement. The analysis results show that we have successfully made tungsten disulfide films of different thicknesses. Moreover, two-dimensional tungsten disulfide thin film has a response to light, gas and pH and related devices have been successfully fabricated in experiments. Among them, comparing the single-layer film and the double-layer film, the film quality of the double-layer film is better. The quality of the film grown on the sapphire substrate is also better than the quality of the film grown on the silicon dioxide substrate.
期刊介绍:
ACS Applied Bio Materials is an interdisciplinary journal publishing original research covering all aspects of biomaterials and biointerfaces including and beyond the traditional biosensing, biomedical and therapeutic applications.
The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrates knowledge in the areas of materials, engineering, physics, bioscience, and chemistry into important bio applications. The journal is specifically interested in work that addresses the relationship between structure and function and assesses the stability and degradation of materials under relevant environmental and biological conditions.