利用射频电容耦合等离子体清洁第一反射镜单元中的两面反射镜

Chenxue Wang, Rong Yan, Yuming Liu, Su Xu, Lei Mu, Wei Zheng, Rui Ding, Junling Chen
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引用次数: 0

摘要

有人提出利用射频等离子体进行第一面镜子(调频)清洗,以恢复热核实验堆等核聚变反应堆的调频反射率。为了研究同时清洗两面镜子对镜子清洗效率和均匀性的影响,在实验室使用射频电容耦合等离子体进行了单面镜子清洗和双面镜子清洗实验。在测试和同时清洗两面镜子时,将面积均为 110 × 80 平方毫米的调频镜和第二面镜子(SM)放置在第一面镜子单元(FMU)内。它们由 16 块镜子样品组成,每块尺寸为 27.5 × 20 平方毫米。这些镜子样品由钛-锆-钼(TZM)合金基板、500 nm 的钼中间层和 30 nm 的氧化铝(Al2O3)表面涂层(作为 Be 杂质的替代物)组成。在自偏压为 -140 V 时,DSM 上的镜面样品的总反射率没有完全恢复,并且随着位置的变化而变化;而在自偏压为 -300 V 时,SFM 和 DFM 上的镜面样品的总反射率完全恢复。能量色散光谱仪(EDS)的结果表明,这些镜子样品上的 Al2O3 涂层已被完全去除。但是,SFM 和 DFM 上每个镜面样品在清洁前后的质量损失因其位置而异,位于角落的镜面样品质量损失较大,而位于中心的镜面样品质量损失较小。与单面镜子清洗相比,同时清洗两面镜子减少了最高和最低质量损失之间的差异。此外,面向 DSM 的 DFM 镜面样品的质量损失有所增加。这表明,在调频装置中面对面同时清洁镜面样品可能会相互影响,因此在今后的研究中需要特别注意。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Cleaning of two mirrors in first mirror unit using radio frequency capacitively coupled plasma
The first mirror (FM) cleaning, using radio frequency plasma, has been proposed to recover the FM reflectivity in nuclear fusion reactors such as ITER. To investigate the influence of simultaneous cleaning of two mirrors on mirror cleaning efficiency and uniformity, experiments involving single-mirror cleaning and dual-mirror cleaning were conducted using radio frequency (RF) capacitively coupled plasma in the laboratory. For the test and simultaneous cleaning of two mirrors, the FM and second mirror (SM), both measuring 110 × 80 mm2, were placed inside the first mirror unit (FMU). They were composed of 16 mirror samples with a dimension of 27.5 × 20 mm2 each. These mirror samples consist of a titanium-zirconium-molybdenum (TZM) alloy substrate, a 500 nm molybdenum intermediate layer, and a 30 nm aluminum oxide (Al2O3) surface coating as a proxy for Be impurities. The cleaning of a single first mirror (SFM) and the simultaneous cleaning of FM and SM (DFM and DSM) were lasted for 9 h using argon (Ar) plasma at a pressure of 1 Pa. The total reflectivity of mirror samples on the DSM did not fully recover and varied with locations with a self-bias of −140 V. While with a self-bias of −300 V, the total reflectivity of mirror samples on SFM and DFM was fully recovered. The energy dispersive spectrometer (EDS) results demonstrated that the Al2O3 coating had been completely removed from these mirror samples. However, the mass loss of each mirror sample on SFM and DFM before and after cleaning varied depending on their locations, with higher mass loss observed for mirror samples located in the corners and lower for those in the center. Compared to the single mirror cleaning, the simultaneous cleaning of two mirrors reduced the difference of the mass loss between the highest and lowest. Furthermore, this mass loss for the mirror samples of DFM facing the DSM was increased. It indicated that the simultaneous cleaning of mirror samples face to face in the FMU could influence each other, highlighting the necessity for special attention in future studies.
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