{"title":"利用低掺杂浓度环提高纳米管无结场效应晶体管的性能","authors":"Liang Wang, Wanyang Xiao, Yueyang Wang, YongLin Bai, Zirui Wang, Jie Xu, Min Tang, Qiuxiang Zhang, Weijing Liu, Wei Bai, Xiaodong Tang","doi":"10.1088/1361-6641/ad5042","DOIUrl":null,"url":null,"abstract":"\n To reduce the static power consumption of the NT JLFET and the effect of SCEs on the NT JLFET, A nanotube junctionless field effect transistor with cyclic low doping concentration regions (C NT JLFET) is proposed. Based on Sentaurus TCAD numerical simulations, the electrical properties of the C NT JLFET and the NT JLFET were comparatively investigated, and the effects of the length (LCD) and radius (RCD) of cyclic low doping concentration regions on the electrical properties of the C NT JLFETs were studied. The C NT JLFET reduces the gate-induced drain leakage (GIDL) due to lateral band-to-band-tunneling (L-BTBT) as compared to the NT JLFET. As the LCD or RCD increases, the off-state current decreases. In addition, the C NT JLFET suffers from fewer short channel effects (SCEs), such as threshold voltage roll-off, drain-induced barrier lowering and subthreshold swing deterioration, compared to the NT JLFET. The inhibition of L-BTBT and attenuation of SCEs by cyclic low doping concentration regions remains when the channel length of the C NT JLFET is shortened to 10 nm. The C NT JLFET are suitable for low power applications as they exhibit reduced L-BTBT and suffer from fewer SCEs.","PeriodicalId":507064,"journal":{"name":"Semiconductor Science and Technology","volume":"8 7","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-05-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Performance enhancement of nanotube junctionless FETs with low doping concentration rings\",\"authors\":\"Liang Wang, Wanyang Xiao, Yueyang Wang, YongLin Bai, Zirui Wang, Jie Xu, Min Tang, Qiuxiang Zhang, Weijing Liu, Wei Bai, Xiaodong Tang\",\"doi\":\"10.1088/1361-6641/ad5042\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n To reduce the static power consumption of the NT JLFET and the effect of SCEs on the NT JLFET, A nanotube junctionless field effect transistor with cyclic low doping concentration regions (C NT JLFET) is proposed. Based on Sentaurus TCAD numerical simulations, the electrical properties of the C NT JLFET and the NT JLFET were comparatively investigated, and the effects of the length (LCD) and radius (RCD) of cyclic low doping concentration regions on the electrical properties of the C NT JLFETs were studied. The C NT JLFET reduces the gate-induced drain leakage (GIDL) due to lateral band-to-band-tunneling (L-BTBT) as compared to the NT JLFET. As the LCD or RCD increases, the off-state current decreases. In addition, the C NT JLFET suffers from fewer short channel effects (SCEs), such as threshold voltage roll-off, drain-induced barrier lowering and subthreshold swing deterioration, compared to the NT JLFET. The inhibition of L-BTBT and attenuation of SCEs by cyclic low doping concentration regions remains when the channel length of the C NT JLFET is shortened to 10 nm. The C NT JLFET are suitable for low power applications as they exhibit reduced L-BTBT and suffer from fewer SCEs.\",\"PeriodicalId\":507064,\"journal\":{\"name\":\"Semiconductor Science and Technology\",\"volume\":\"8 7\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-05-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Semiconductor Science and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6641/ad5042\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Semiconductor Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1088/1361-6641/ad5042","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
摘要
为了降低 NT JLFET 的静态功耗以及 SCE 对 NT JLFET 的影响,我们提出了一种具有循环低掺杂浓度区的纳米管无结场效应晶体管(C NT JLFET)。基于 Sentaurus TCAD 数值模拟,比较研究了 C NT JLFET 和 NT JLFET 的电学特性,并研究了循环低掺杂浓度区的长度(LCD)和半径(RCD)对 C NT JLFET 电学特性的影响。与 NT JLFET 相比,C NT JLFET 减少了横向带对带隧道(L-BTBT)导致的栅极诱导漏极漏电(GIDL)。随着 LCD 或 RCD 的增大,关态电流会减小。此外,与 NT JLFET 相比,C NT JLFET 受到的短沟道效应(SCE)较少,如阈值电压滚降、漏极诱导的势垒降低和阈下摆幅恶化。当 C NT JLFET 的沟道长度缩短到 10 nm 时,循环低掺杂浓度区域对 L-BTBT 的抑制和 SCE 的衰减仍然存在。C NT JLFET 适合低功率应用,因为它们能降低 L-BTBT 并减少 SCE。
Performance enhancement of nanotube junctionless FETs with low doping concentration rings
To reduce the static power consumption of the NT JLFET and the effect of SCEs on the NT JLFET, A nanotube junctionless field effect transistor with cyclic low doping concentration regions (C NT JLFET) is proposed. Based on Sentaurus TCAD numerical simulations, the electrical properties of the C NT JLFET and the NT JLFET were comparatively investigated, and the effects of the length (LCD) and radius (RCD) of cyclic low doping concentration regions on the electrical properties of the C NT JLFETs were studied. The C NT JLFET reduces the gate-induced drain leakage (GIDL) due to lateral band-to-band-tunneling (L-BTBT) as compared to the NT JLFET. As the LCD or RCD increases, the off-state current decreases. In addition, the C NT JLFET suffers from fewer short channel effects (SCEs), such as threshold voltage roll-off, drain-induced barrier lowering and subthreshold swing deterioration, compared to the NT JLFET. The inhibition of L-BTBT and attenuation of SCEs by cyclic low doping concentration regions remains when the channel length of the C NT JLFET is shortened to 10 nm. The C NT JLFET are suitable for low power applications as they exhibit reduced L-BTBT and suffer from fewer SCEs.