欧姆接触测试结构的电阻器-肖特基势垒分析模型

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2024-05-10 DOI:10.1088/1361-6641/ad49c8

Thanh Chi Pham, Hiep Tran, James G Partridge, Anthony Holland

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引用次数: 0

摘要

用于研究测试结构中金属-半导体（M-S）欧姆接触的分析模型通常包括纯电阻接触界面。鉴于 M-S 触点从根本上受电子穿过 M-S 接口势能势垒的隧穿作用支配，这种简化方法可能会导致误解。本文详细介绍了一种新颖的电阻-肖特基（RSB）势垒分析模型，该模型能够更深入地探索欧姆接触的基本物理原理。本文对提出的模型进行了分析，并将其与使用半导体器件模拟工具 TCAD 构建的模型进行了比较。研究表明，采用 RSB 模型而非传统的传输线 (TLM) 模型时，结果会有显著差异，有助于更全面地了解测试结构中的 M-S 欧姆触点。

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Resistor-to-Schottky barrier analytical model for ohmic contact test structures

Analytical models for investigating Metal-Semiconductor (M-S) ohmic contacts in test structures have conventionally included resistive-only contact interfaces. Given that M-S contacts are fundamentally governed by electron tunnelling across the potential energy barrier at the M-S interface, this simplified approach may result in misinterpretation. This paper describes, in detail, a novel Resistor-to-Schottky (RSB) barrier analytical model that enables a more in-depth exploration of the physics underlying ohmic contacts. The proposed model is analysed and compared with models constructed using the semiconductor device simulator tool TCAD. The study reveals significant differences in outcomes when employing the RSB model rather than the conventional Transmission Line (TLM) model and contributes to a more comprehensive understanding of M-S ohmic contacts in test structures.

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.