氮化镓在硝酸铵和硝酸镓水溶液中的氧化铟锡和氧化氟锡电极上的电沉积

Mauricio A. Leyva Aranzabal, Carlos R. Cabrera
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引用次数: 0

摘要

半导体技术中的氮化镓薄膜备受关注。本研究旨在开发一种适用于所需领域的有效氮化镓电沉积技术。为确定最佳条件,在掺硼金刚石电极上以 0.01 mV/s 的电位扫描速率和 0.8 V 对 Ag/AgCl(饱和氯化钾)恒定应用电位进行了循环伏安法(CV)研究。在 CV 研究中,与 Ag/Ag/Cl(饱和氯化钾)相比,在 -1.75 V 处形成了一个明确的峰值。为了开始检查氧化铟锡 (ITO) 和氧化氟锡 (FTO) 电极上的薄膜特征,我们在 3600 秒到 14000 秒的时间尺度范围内,以-1.7 V 的恒定应用电位对 Ag/AgCl(饱和氯化钾)进行了时变测量 (CA)。用于检测样品的表征方法包括 SEM 和 EDS。在 ITO 上 Ga 和 N 的最佳电沉积重量百分比分别为 10.3% 和 27.2%,在 FTO 上分别为 47.3% 和 12.7%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Gallium Nitride Electrodeposition at Indium Tin Oxide and Fluorine Tin Oxide Electrodes in Ammonium Nitrate and Gallium Nitrate Aqueous Solution
Gallium nitride thin films in semiconductor technology have garnered interest. This study aims to develop an effective GaN electrodeposition technique applicable where needed. To determine the optimal conditions, cyclic voltammetry (CV) was done on a boron-doped diamond electrode at 0.01 mV/s potential scan rate and at 0.8 V vs. Ag/AgCl (Saturated KCl) constant applied potential. In the CV study, a well-defined peak formed at -1.75 V vs. Ag/Ag/Cl (Saturated KCl). To start examining thin film features on Indium Tin Oxide (ITO) and Fluorine Tin Oxide (FTO) electrodes, chronoamperometry (CA) measurements were done at time scales ranging from 3600s to 14,000s and at a constant applied potential of -1.7 V vs. Ag/AgCl (Saturated KCl). The characterization methods used to examine the samples included SEM and EDS. The optimal weight electrodeposition percentages of Ga and N on ITO were 10.3% and 27.2% and 47.3% and 12.7% on FTO respectively.
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